10/7/2012	12:12:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2012	12:12:30 PM	Recipe started at 12:12 PM
10/7/2012	12:12:30 PM	Helium valve closed
10/7/2012	12:12:30 PM	H2 valve closed
10/7/2012	12:12:30 PM	BCl3 valve closed
10/7/2012	12:12:30 PM	PH3 valve closed
10/7/2012	12:12:30 PM	SiCl4 pre valve closed
10/7/2012	12:12:30 PM	SiCl4 post valve closed
10/7/2012	12:12:30 PM	Main Vac valve closed
10/7/2012	12:12:30 PM	Bypass valve closed
10/7/2012	12:12:30 PM	Bubbler valve closed
10/7/2012	12:12:30 PM	Helium MFC set to  0.000000
10/7/2012	12:12:30 PM	H2 MFC set to  0.000000
10/7/2012	12:12:30 PM	BCl3 MFC set to  0.000000
10/7/2012	12:12:30 PM	PH3 MFC set to  0.000000
10/7/2012	12:12:30 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:12:30 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:12:30 PM	Tube furnace set to 0
10/7/2012	12:12:33 PM	H2 valve closed
10/7/2012	12:12:33 PM	BCl3 valve closed
10/7/2012	12:12:33 PM	PH3 valve closed
10/7/2012	12:12:33 PM	SiCl4 pre valve closed
10/7/2012	12:12:33 PM	SiCl4 post valve closed
10/7/2012	12:12:33 PM	Main Vac valve closed
10/7/2012	12:12:33 PM	Bypass valve closed
10/7/2012	12:12:33 PM	Bubbler valve closed
10/7/2012	12:12:33 PM	Helium valve opened
10/7/2012	12:12:33 PM	Helium MFC set to  500.000000
10/7/2012	12:12:33 PM	H2 MFC set to  0.000000
10/7/2012	12:12:33 PM	BCl3 MFC set to  0.000000
10/7/2012	12:12:33 PM	PH3 MFC set to  0.000000
10/7/2012	12:12:33 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:12:33 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:12:33 PM	Tube furnace set to 0
10/7/2012	12:13:39 PM	Helium valve closed
10/7/2012	12:13:39 PM	H2 valve closed
10/7/2012	12:13:39 PM	BCl3 valve closed
10/7/2012	12:13:39 PM	PH3 valve closed
10/7/2012	12:13:39 PM	SiCl4 pre valve closed
10/7/2012	12:13:39 PM	SiCl4 post valve closed
10/7/2012	12:13:39 PM	Main Vac valve closed
10/7/2012	12:13:39 PM	Bypass valve closed
10/7/2012	12:13:39 PM	Bubbler valve closed
10/7/2012	12:13:39 PM	Helium MFC set to  0.000000
10/7/2012	12:13:39 PM	H2 MFC set to  0.000000
10/7/2012	12:13:39 PM	BCl3 MFC set to  0.000000
10/7/2012	12:13:39 PM	PH3 MFC set to  0.000000
10/7/2012	12:13:39 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:13:39 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:13:39 PM	Tube furnace set to 0
10/7/2012	12:13:40 PM	Run finished at 12:13 PM
10/7/2012	12:13:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2012	12:18:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	12:18:05 PM	Recipe started at 12:18 PM
10/7/2012	12:18:05 PM	Helium valve closed
10/7/2012	12:18:05 PM	H2 valve closed
10/7/2012	12:18:05 PM	BCl3 valve closed
10/7/2012	12:18:05 PM	PH3 valve closed
10/7/2012	12:18:05 PM	SiCl4 pre valve closed
10/7/2012	12:18:05 PM	SiCl4 post valve closed
10/7/2012	12:18:05 PM	Main Vac valve closed
10/7/2012	12:18:05 PM	Bubbler valve closed
10/7/2012	12:18:05 PM	Bypass valve opened
10/7/2012	12:18:05 PM	Helium MFC set to  0.000000
10/7/2012	12:18:05 PM	H2 MFC set to  0.000000
10/7/2012	12:18:05 PM	BCl3 MFC set to  0.000000
10/7/2012	12:18:05 PM	PH3 MFC set to  0.000000
10/7/2012	12:18:05 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:18:05 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:18:05 PM	Tube furnace set to 0
10/7/2012	12:24:15 PM	Run aborted at 12:24 PM
10/7/2012	12:24:15 PM	Helium valve closed
10/7/2012	12:24:15 PM	H2 valve closed
10/7/2012	12:24:15 PM	BCl3 valve closed
10/7/2012	12:24:15 PM	PH3 valve closed
10/7/2012	12:24:15 PM	SiCl4 pre valve closed
10/7/2012	12:24:15 PM	SiCl4 post valve closed
10/7/2012	12:24:15 PM	Bypass valve closed
10/7/2012	12:24:15 PM	Main Vac valve closed
10/7/2012	12:24:15 PM	Bubbler valve closed
10/7/2012	12:24:15 PM	Helium MFC set to  0.000000
10/7/2012	12:24:15 PM	H2 MFC set to  0.000000
10/7/2012	12:24:15 PM	BCl3 MFC set to  0.000000
10/7/2012	12:24:15 PM	PH3 MFC set to  0.000000
10/7/2012	12:24:15 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:24:15 PM	Tube furnace set to 0
10/7/2012	12:24:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	12:24:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2012	12:24:18 PM	Recipe started at 12:24 PM
10/7/2012	12:24:18 PM	Helium valve closed
10/7/2012	12:24:18 PM	H2 valve closed
10/7/2012	12:24:18 PM	BCl3 valve closed
10/7/2012	12:24:18 PM	PH3 valve closed
10/7/2012	12:24:18 PM	SiCl4 pre valve closed
10/7/2012	12:24:18 PM	SiCl4 post valve closed
10/7/2012	12:24:18 PM	Main Vac valve closed
10/7/2012	12:24:18 PM	Bypass valve closed
10/7/2012	12:24:18 PM	Bubbler valve closed
10/7/2012	12:24:18 PM	Helium MFC set to  0.000000
10/7/2012	12:24:18 PM	H2 MFC set to  0.000000
10/7/2012	12:24:18 PM	BCl3 MFC set to  0.000000
10/7/2012	12:24:18 PM	PH3 MFC set to  0.000000
10/7/2012	12:24:18 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:24:18 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:24:18 PM	Tube furnace set to 0
10/7/2012	12:24:21 PM	H2 valve closed
10/7/2012	12:24:21 PM	BCl3 valve closed
10/7/2012	12:24:21 PM	PH3 valve closed
10/7/2012	12:24:21 PM	SiCl4 pre valve closed
10/7/2012	12:24:21 PM	SiCl4 post valve closed
10/7/2012	12:24:21 PM	Main Vac valve closed
10/7/2012	12:24:21 PM	Bypass valve closed
10/7/2012	12:24:21 PM	Bubbler valve closed
10/7/2012	12:24:21 PM	Helium valve opened
10/7/2012	12:24:21 PM	Helium MFC set to  500.000000
10/7/2012	12:24:21 PM	H2 MFC set to  0.000000
10/7/2012	12:24:21 PM	BCl3 MFC set to  0.000000
10/7/2012	12:24:21 PM	PH3 MFC set to  0.000000
10/7/2012	12:24:21 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:24:21 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:24:21 PM	Tube furnace set to 0
10/7/2012	12:25:31 PM	Helium valve closed
10/7/2012	12:25:31 PM	H2 valve closed
10/7/2012	12:25:31 PM	BCl3 valve closed
10/7/2012	12:25:31 PM	PH3 valve closed
10/7/2012	12:25:31 PM	SiCl4 pre valve closed
10/7/2012	12:25:31 PM	SiCl4 post valve closed
10/7/2012	12:25:31 PM	Main Vac valve closed
10/7/2012	12:25:31 PM	Bypass valve closed
10/7/2012	12:25:31 PM	Bubbler valve closed
10/7/2012	12:25:31 PM	Helium MFC set to  0.000000
10/7/2012	12:25:31 PM	H2 MFC set to  0.000000
10/7/2012	12:25:31 PM	BCl3 MFC set to  0.000000
10/7/2012	12:25:31 PM	PH3 MFC set to  0.000000
10/7/2012	12:25:31 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:25:31 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:25:32 PM	Tube furnace set to 0
10/7/2012	12:25:33 PM	Run finished at 12:25 PM
10/7/2012	12:25:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2012	12:26:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	12:26:22 PM	Recipe started at 12:26 PM
10/7/2012	12:26:22 PM	Helium valve closed
10/7/2012	12:26:22 PM	H2 valve closed
10/7/2012	12:26:22 PM	BCl3 valve closed
10/7/2012	12:26:22 PM	PH3 valve closed
10/7/2012	12:26:22 PM	SiCl4 pre valve closed
10/7/2012	12:26:22 PM	SiCl4 post valve closed
10/7/2012	12:26:22 PM	Main Vac valve closed
10/7/2012	12:26:22 PM	Bubbler valve closed
10/7/2012	12:26:22 PM	Bypass valve opened
10/7/2012	12:26:22 PM	Helium MFC set to  0.000000
10/7/2012	12:26:22 PM	H2 MFC set to  0.000000
10/7/2012	12:26:22 PM	BCl3 MFC set to  0.000000
10/7/2012	12:26:22 PM	PH3 MFC set to  0.000000
10/7/2012	12:26:22 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:26:22 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:26:22 PM	Tube furnace set to 0
10/7/2012	12:31:37 PM	Run aborted at 12:31 PM
10/7/2012	12:31:37 PM	Helium valve closed
10/7/2012	12:31:37 PM	H2 valve closed
10/7/2012	12:31:37 PM	BCl3 valve closed
10/7/2012	12:31:37 PM	PH3 valve closed
10/7/2012	12:31:37 PM	SiCl4 pre valve closed
10/7/2012	12:31:37 PM	SiCl4 post valve closed
10/7/2012	12:31:37 PM	Bypass valve closed
10/7/2012	12:31:37 PM	Main Vac valve closed
10/7/2012	12:31:37 PM	Bubbler valve closed
10/7/2012	12:31:37 PM	Helium MFC set to  0.000000
10/7/2012	12:31:37 PM	H2 MFC set to  0.000000
10/7/2012	12:31:37 PM	BCl3 MFC set to  0.000000
10/7/2012	12:31:38 PM	PH3 MFC set to  0.000000
10/7/2012	12:31:38 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:31:38 PM	Tube furnace set to 0
10/7/2012	12:31:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	12:31:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2012	12:31:51 PM	Recipe started at 12:31 PM
10/7/2012	12:31:51 PM	Helium valve closed
10/7/2012	12:31:51 PM	H2 valve closed
10/7/2012	12:31:51 PM	BCl3 valve closed
10/7/2012	12:31:51 PM	PH3 valve closed
10/7/2012	12:31:51 PM	SiCl4 pre valve closed
10/7/2012	12:31:51 PM	SiCl4 post valve closed
10/7/2012	12:31:51 PM	Main Vac valve closed
10/7/2012	12:31:51 PM	Bypass valve closed
10/7/2012	12:31:51 PM	Bubbler valve closed
10/7/2012	12:31:51 PM	Helium MFC set to  0.000000
10/7/2012	12:31:51 PM	H2 MFC set to  0.000000
10/7/2012	12:31:51 PM	BCl3 MFC set to  0.000000
10/7/2012	12:31:51 PM	PH3 MFC set to  0.000000
10/7/2012	12:31:51 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:31:51 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:31:51 PM	Tube furnace set to 0
10/7/2012	12:31:54 PM	H2 valve closed
10/7/2012	12:31:54 PM	BCl3 valve closed
10/7/2012	12:31:54 PM	PH3 valve closed
10/7/2012	12:31:54 PM	SiCl4 pre valve closed
10/7/2012	12:31:54 PM	SiCl4 post valve closed
10/7/2012	12:31:54 PM	Main Vac valve closed
10/7/2012	12:31:54 PM	Bypass valve closed
10/7/2012	12:31:54 PM	Bubbler valve closed
10/7/2012	12:31:54 PM	Helium valve opened
10/7/2012	12:31:54 PM	Helium MFC set to  500.000000
10/7/2012	12:31:54 PM	H2 MFC set to  0.000000
10/7/2012	12:31:54 PM	BCl3 MFC set to  0.000000
10/7/2012	12:31:54 PM	PH3 MFC set to  0.000000
10/7/2012	12:31:54 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:31:54 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:31:55 PM	Tube furnace set to 0
10/7/2012	12:33:04 PM	Helium valve closed
10/7/2012	12:33:04 PM	H2 valve closed
10/7/2012	12:33:04 PM	BCl3 valve closed
10/7/2012	12:33:04 PM	PH3 valve closed
10/7/2012	12:33:04 PM	SiCl4 pre valve closed
10/7/2012	12:33:04 PM	SiCl4 post valve closed
10/7/2012	12:33:04 PM	Main Vac valve closed
10/7/2012	12:33:04 PM	Bypass valve closed
10/7/2012	12:33:04 PM	Bubbler valve closed
10/7/2012	12:33:04 PM	Helium MFC set to  0.000000
10/7/2012	12:33:04 PM	H2 MFC set to  0.000000
10/7/2012	12:33:04 PM	BCl3 MFC set to  0.000000
10/7/2012	12:33:04 PM	PH3 MFC set to  0.000000
10/7/2012	12:33:04 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:33:04 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:33:05 PM	Tube furnace set to 0
10/7/2012	12:33:06 PM	Run finished at 12:33 PM
10/7/2012	12:33:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2012	12:39:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	12:39:09 PM	Recipe started at 12:39 PM
10/7/2012	12:39:09 PM	Helium valve closed
10/7/2012	12:39:09 PM	H2 valve closed
10/7/2012	12:39:09 PM	BCl3 valve closed
10/7/2012	12:39:09 PM	PH3 valve closed
10/7/2012	12:39:09 PM	SiCl4 pre valve closed
10/7/2012	12:39:09 PM	SiCl4 post valve closed
10/7/2012	12:39:09 PM	Main Vac valve closed
10/7/2012	12:39:09 PM	Bubbler valve closed
10/7/2012	12:39:09 PM	Bypass valve opened
10/7/2012	12:39:09 PM	Helium MFC set to  0.000000
10/7/2012	12:39:09 PM	H2 MFC set to  0.000000
10/7/2012	12:39:09 PM	BCl3 MFC set to  0.000000
10/7/2012	12:39:09 PM	PH3 MFC set to  0.000000
10/7/2012	12:39:09 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:39:09 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:39:09 PM	Tube furnace set to 0
10/7/2012	12:45:24 PM	Helium valve closed
10/7/2012	12:45:24 PM	H2 valve closed
10/7/2012	12:45:24 PM	BCl3 valve closed
10/7/2012	12:45:24 PM	PH3 valve closed
10/7/2012	12:45:24 PM	SiCl4 pre valve closed
10/7/2012	12:45:24 PM	SiCl4 post valve closed
10/7/2012	12:45:24 PM	Main Vac valve closed
10/7/2012	12:45:24 PM	Bubbler valve closed
10/7/2012	12:45:24 PM	Bypass valve opened
10/7/2012	12:45:24 PM	Helium MFC set to  0.000000
10/7/2012	12:45:24 PM	H2 MFC set to  0.000000
10/7/2012	12:45:24 PM	BCl3 MFC set to  0.000000
10/7/2012	12:45:24 PM	PH3 MFC set to  0.000000
10/7/2012	12:45:24 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:45:24 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:45:24 PM	Tube furnace set to 0
10/7/2012	12:45:42 PM	Helium valve closed
10/7/2012	12:45:42 PM	H2 valve closed
10/7/2012	12:45:42 PM	BCl3 valve closed
10/7/2012	12:45:42 PM	PH3 valve closed
10/7/2012	12:45:42 PM	SiCl4 pre valve closed
10/7/2012	12:45:42 PM	SiCl4 post valve closed
10/7/2012	12:45:42 PM	Bypass valve closed
10/7/2012	12:45:43 PM	Bubbler valve closed
10/7/2012	12:45:43 PM	Main Vac valve opened
10/7/2012	12:45:43 PM	Helium MFC set to  0.000000
10/7/2012	12:45:43 PM	H2 MFC set to  0.000000
10/7/2012	12:45:43 PM	BCl3 MFC set to  0.000000
10/7/2012	12:45:43 PM	PH3 MFC set to  0.000000
10/7/2012	12:45:43 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:45:43 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:45:43 PM	Tube furnace set to 0
10/7/2012	12:45:44 PM	Run finished at 12:45 PM
10/7/2012	12:45:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	12:46:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/7/2012	12:46:33 PM	Recipe started at 12:46 PM
10/7/2012	12:46:33 PM	Helium valve closed
10/7/2012	12:46:33 PM	H2 valve closed
10/7/2012	12:46:33 PM	BCl3 valve closed
10/7/2012	12:46:33 PM	PH3 valve closed
10/7/2012	12:46:33 PM	SiCl4 pre valve closed
10/7/2012	12:46:33 PM	SiCl4 post valve closed
10/7/2012	12:46:33 PM	Main Vac valve closed
10/7/2012	12:46:33 PM	Bubbler valve closed
10/7/2012	12:46:33 PM	Bypass valve opened
10/7/2012	12:46:33 PM	Helium MFC set to  0.000000
10/7/2012	12:46:33 PM	H2 MFC set to  0.000000
10/7/2012	12:46:33 PM	BCl3 MFC set to  0.000000
10/7/2012	12:46:33 PM	PH3 MFC set to  0.000000
10/7/2012	12:46:33 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:46:33 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:46:34 PM	Tube furnace set to 0
10/7/2012	12:46:49 PM	Helium valve closed
10/7/2012	12:46:49 PM	H2 valve closed
10/7/2012	12:46:49 PM	BCl3 valve closed
10/7/2012	12:46:49 PM	PH3 valve closed
10/7/2012	12:46:49 PM	SiCl4 pre valve closed
10/7/2012	12:46:49 PM	SiCl4 post valve closed
10/7/2012	12:46:49 PM	Main Vac valve closed
10/7/2012	12:46:49 PM	Bubbler valve closed
10/7/2012	12:46:49 PM	Bypass valve opened
10/7/2012	12:46:49 PM	Helium MFC set to  0.000000
10/7/2012	12:46:49 PM	H2 MFC set to  0.000000
10/7/2012	12:46:49 PM	BCl3 MFC set to  0.000000
10/7/2012	12:46:49 PM	PH3 MFC set to  0.000000
10/7/2012	12:46:49 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:46:49 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:46:50 PM	Tube furnace set to 0
10/7/2012	12:46:51 PM	Helium valve closed
10/7/2012	12:46:51 PM	H2 valve closed
10/7/2012	12:46:51 PM	BCl3 valve closed
10/7/2012	12:46:51 PM	PH3 valve closed
10/7/2012	12:46:51 PM	SiCl4 pre valve closed
10/7/2012	12:46:51 PM	SiCl4 post valve closed
10/7/2012	12:46:51 PM	Bypass valve closed
10/7/2012	12:46:51 PM	Bubbler valve closed
10/7/2012	12:46:51 PM	Main Vac valve opened
10/7/2012	12:46:51 PM	Helium MFC set to  0.000000
10/7/2012	12:46:51 PM	H2 MFC set to  0.000000
10/7/2012	12:46:51 PM	BCl3 MFC set to  0.000000
10/7/2012	12:46:51 PM	PH3 MFC set to  0.000000
10/7/2012	12:46:51 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:46:51 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:46:51 PM	Tube furnace set to 0
10/7/2012	12:47:21 PM	H2 valve closed
10/7/2012	12:47:21 PM	BCl3 valve closed
10/7/2012	12:47:21 PM	PH3 valve closed
10/7/2012	12:47:21 PM	SiCl4 pre valve closed
10/7/2012	12:47:21 PM	SiCl4 post valve closed
10/7/2012	12:47:21 PM	Bypass valve closed
10/7/2012	12:47:21 PM	Bubbler valve closed
10/7/2012	12:47:21 PM	Helium valve opened
10/7/2012	12:47:21 PM	Main Vac valve opened
10/7/2012	12:47:21 PM	Helium MFC set to  20.000000
10/7/2012	12:47:21 PM	H2 MFC set to  0.000000
10/7/2012	12:47:21 PM	BCl3 MFC set to  0.000000
10/7/2012	12:47:21 PM	PH3 MFC set to  0.000000
10/7/2012	12:47:21 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:47:21 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:47:21 PM	Tube furnace set to 0
10/7/2012	12:47:51 PM	Helium valve closed
10/7/2012	12:47:51 PM	H2 valve closed
10/7/2012	12:47:51 PM	BCl3 valve closed
10/7/2012	12:47:51 PM	PH3 valve closed
10/7/2012	12:47:51 PM	SiCl4 pre valve closed
10/7/2012	12:47:51 PM	SiCl4 post valve closed
10/7/2012	12:47:51 PM	Bypass valve closed
10/7/2012	12:47:51 PM	Bubbler valve closed
10/7/2012	12:47:51 PM	Main Vac valve opened
10/7/2012	12:47:51 PM	Helium MFC set to  0.000000
10/7/2012	12:47:51 PM	H2 MFC set to  0.000000
10/7/2012	12:47:51 PM	BCl3 MFC set to  0.000000
10/7/2012	12:47:51 PM	PH3 MFC set to  0.000000
10/7/2012	12:47:51 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:47:51 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:47:51 PM	Tube furnace set to 0
10/7/2012	12:48:21 PM	H2 valve closed
10/7/2012	12:48:21 PM	BCl3 valve closed
10/7/2012	12:48:21 PM	PH3 valve closed
10/7/2012	12:48:21 PM	SiCl4 pre valve closed
10/7/2012	12:48:21 PM	SiCl4 post valve closed
10/7/2012	12:48:21 PM	Bypass valve closed
10/7/2012	12:48:21 PM	Bubbler valve closed
10/7/2012	12:48:21 PM	Helium valve opened
10/7/2012	12:48:21 PM	Main Vac valve opened
10/7/2012	12:48:21 PM	Helium MFC set to  20.000000
10/7/2012	12:48:21 PM	H2 MFC set to  0.000000
10/7/2012	12:48:21 PM	BCl3 MFC set to  0.000000
10/7/2012	12:48:21 PM	PH3 MFC set to  0.000000
10/7/2012	12:48:21 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:48:21 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:48:22 PM	Tube furnace set to 0
10/7/2012	12:48:52 PM	Helium valve closed
10/7/2012	12:48:52 PM	H2 valve closed
10/7/2012	12:48:52 PM	BCl3 valve closed
10/7/2012	12:48:52 PM	PH3 valve closed
10/7/2012	12:48:52 PM	SiCl4 pre valve closed
10/7/2012	12:48:52 PM	SiCl4 post valve closed
10/7/2012	12:48:52 PM	Bypass valve closed
10/7/2012	12:48:52 PM	Bubbler valve closed
10/7/2012	12:48:52 PM	Main Vac valve opened
10/7/2012	12:48:52 PM	Helium MFC set to  0.000000
10/7/2012	12:48:52 PM	H2 MFC set to  0.000000
10/7/2012	12:48:52 PM	BCl3 MFC set to  0.000000
10/7/2012	12:48:52 PM	PH3 MFC set to  0.000000
10/7/2012	12:48:52 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:48:52 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:48:52 PM	Tube furnace set to 0
10/7/2012	12:49:22 PM	H2 valve closed
10/7/2012	12:49:22 PM	BCl3 valve closed
10/7/2012	12:49:22 PM	PH3 valve closed
10/7/2012	12:49:22 PM	SiCl4 pre valve closed
10/7/2012	12:49:22 PM	SiCl4 post valve closed
10/7/2012	12:49:22 PM	Bypass valve closed
10/7/2012	12:49:22 PM	Bubbler valve closed
10/7/2012	12:49:22 PM	Helium valve opened
10/7/2012	12:49:22 PM	Main Vac valve opened
10/7/2012	12:49:22 PM	Helium MFC set to  20.000000
10/7/2012	12:49:22 PM	H2 MFC set to  0.000000
10/7/2012	12:49:22 PM	BCl3 MFC set to  0.000000
10/7/2012	12:49:22 PM	PH3 MFC set to  0.000000
10/7/2012	12:49:22 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:49:22 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:49:22 PM	Tube furnace set to 0
10/7/2012	12:49:52 PM	Helium valve closed
10/7/2012	12:49:52 PM	H2 valve closed
10/7/2012	12:49:52 PM	BCl3 valve closed
10/7/2012	12:49:52 PM	PH3 valve closed
10/7/2012	12:49:52 PM	SiCl4 pre valve closed
10/7/2012	12:49:52 PM	SiCl4 post valve closed
10/7/2012	12:49:52 PM	Bypass valve closed
10/7/2012	12:49:52 PM	Bubbler valve closed
10/7/2012	12:49:52 PM	Main Vac valve opened
10/7/2012	12:49:52 PM	Helium MFC set to  0.000000
10/7/2012	12:49:52 PM	H2 MFC set to  0.000000
10/7/2012	12:49:52 PM	BCl3 MFC set to  0.000000
10/7/2012	12:49:52 PM	PH3 MFC set to  0.000000
10/7/2012	12:49:52 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:49:52 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:49:52 PM	Tube furnace set to 0
10/7/2012	12:50:16 PM	Run aborted at 12:50 PM
10/7/2012	12:50:16 PM	Helium valve closed
10/7/2012	12:50:16 PM	H2 valve closed
10/7/2012	12:50:16 PM	BCl3 valve closed
10/7/2012	12:50:16 PM	PH3 valve closed
10/7/2012	12:50:16 PM	SiCl4 pre valve closed
10/7/2012	12:50:16 PM	SiCl4 post valve closed
10/7/2012	12:50:16 PM	Bypass valve closed
10/7/2012	12:50:16 PM	Main Vac valve closed
10/7/2012	12:50:16 PM	Bubbler valve closed
10/7/2012	12:50:16 PM	Helium MFC set to  0.000000
10/7/2012	12:50:16 PM	H2 MFC set to  0.000000
10/7/2012	12:50:16 PM	BCl3 MFC set to  0.000000
10/7/2012	12:50:16 PM	PH3 MFC set to  0.000000
10/7/2012	12:50:16 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:50:17 PM	Tube furnace set to 0
10/7/2012	12:50:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/7/2012	12:50:30 PM	Main Vac valve opened
10/7/2012	12:51:17 PM	Recipe started at 12:51 PM
10/7/2012	12:51:17 PM	Helium valve closed
10/7/2012	12:51:17 PM	H2 valve closed
10/7/2012	12:51:17 PM	BCl3 valve closed
10/7/2012	12:51:17 PM	PH3 valve closed
10/7/2012	12:51:17 PM	SiCl4 pre valve closed
10/7/2012	12:51:17 PM	SiCl4 post valve closed
10/7/2012	12:51:17 PM	Bypass valve closed
10/7/2012	12:51:17 PM	Bubbler valve closed
10/7/2012	12:51:17 PM	Main Vac valve opened
10/7/2012	12:51:17 PM	Helium MFC set to  0.000000
10/7/2012	12:51:17 PM	H2 MFC set to  0.000000
10/7/2012	12:51:17 PM	BCl3 MFC set to  0.000000
10/7/2012	12:51:17 PM	PH3 MFC set to  0.000000
10/7/2012	12:51:17 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:51:17 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:51:17 PM	Tube furnace set to 150
10/7/2012	12:51:38 PM	Run aborted at 12:51 PM
10/7/2012	12:51:39 PM	Helium valve closed
10/7/2012	12:51:39 PM	H2 valve closed
10/7/2012	12:51:39 PM	BCl3 valve closed
10/7/2012	12:51:39 PM	PH3 valve closed
10/7/2012	12:51:39 PM	SiCl4 pre valve closed
10/7/2012	12:51:39 PM	SiCl4 post valve closed
10/7/2012	12:51:39 PM	Bypass valve closed
10/7/2012	12:51:39 PM	Main Vac valve closed
10/7/2012	12:51:39 PM	Bubbler valve closed
10/7/2012	12:51:39 PM	Helium MFC set to  0.000000
10/7/2012	12:51:39 PM	H2 MFC set to  0.000000
10/7/2012	12:51:39 PM	BCl3 MFC set to  0.000000
10/7/2012	12:51:39 PM	PH3 MFC set to  0.000000
10/7/2012	12:51:39 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:51:39 PM	Tube furnace set to 0
10/7/2012	12:51:43 PM	Main Vac valve opened
10/7/2012	12:55:24 PM	Main Vac valve closed
10/7/2012	12:55:29 PM	Main Vac valve opened
10/7/2012	12:56:19 PM	Recipe started at 12:56 PM
10/7/2012	12:56:19 PM	Helium valve closed
10/7/2012	12:56:19 PM	H2 valve closed
10/7/2012	12:56:19 PM	BCl3 valve closed
10/7/2012	12:56:19 PM	PH3 valve closed
10/7/2012	12:56:19 PM	SiCl4 pre valve closed
10/7/2012	12:56:19 PM	SiCl4 post valve closed
10/7/2012	12:56:19 PM	Main Vac valve closed
10/7/2012	12:56:19 PM	Bypass valve closed
10/7/2012	12:56:19 PM	Bubbler valve closed
10/7/2012	12:56:19 PM	Helium MFC set to  0.000000
10/7/2012	12:56:19 PM	H2 MFC set to  0.000000
10/7/2012	12:56:19 PM	BCl3 MFC set to  0.000000
10/7/2012	12:56:19 PM	PH3 MFC set to  0.000000
10/7/2012	12:56:19 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:56:19 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:56:19 PM	Tube furnace set to 0
10/7/2012	12:56:22 PM	Helium valve closed
10/7/2012	12:56:22 PM	BCl3 valve closed
10/7/2012	12:56:22 PM	PH3 valve closed
10/7/2012	12:56:22 PM	SiCl4 pre valve closed
10/7/2012	12:56:22 PM	SiCl4 post valve closed
10/7/2012	12:56:22 PM	Main Vac valve closed
10/7/2012	12:56:22 PM	Bypass valve closed
10/7/2012	12:56:22 PM	Bubbler valve closed
10/7/2012	12:56:22 PM	H2 valve opened
10/7/2012	12:56:22 PM	Helium MFC set to  0.000000
10/7/2012	12:56:22 PM	H2 MFC set to  500.000000
10/7/2012	12:56:22 PM	BCl3 MFC set to  0.000000
10/7/2012	12:56:22 PM	PH3 MFC set to  0.000000
10/7/2012	12:56:22 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:56:22 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:56:22 PM	Tube furnace set to 0
10/7/2012	12:57:34 PM	Helium valve closed
10/7/2012	12:57:34 PM	BCl3 valve closed
10/7/2012	12:57:34 PM	PH3 valve closed
10/7/2012	12:57:34 PM	SiCl4 pre valve closed
10/7/2012	12:57:34 PM	SiCl4 post valve closed
10/7/2012	12:57:34 PM	Main Vac valve closed
10/7/2012	12:57:34 PM	Bypass valve closed
10/7/2012	12:57:34 PM	H2 valve opened
10/7/2012	12:57:34 PM	Bubbler valve opened
10/7/2012	12:57:34 PM	Helium MFC set to  0.000000
10/7/2012	12:57:34 PM	H2 MFC set to  500.000000
10/7/2012	12:57:34 PM	BCl3 MFC set to  0.000000
10/7/2012	12:57:34 PM	PH3 MFC set to  0.000000
10/7/2012	12:57:34 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:57:34 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:57:34 PM	Tube furnace set to 0
10/7/2012	12:57:35 PM	Helium valve closed
10/7/2012	12:57:35 PM	BCl3 valve closed
10/7/2012	12:57:35 PM	PH3 valve closed
10/7/2012	12:57:35 PM	SiCl4 pre valve closed
10/7/2012	12:57:35 PM	SiCl4 post valve closed
10/7/2012	12:57:35 PM	Main Vac valve closed
10/7/2012	12:57:35 PM	Bypass valve closed
10/7/2012	12:57:35 PM	H2 valve opened
10/7/2012	12:57:35 PM	Bubbler valve opened
10/7/2012	12:57:35 PM	Helium MFC set to  0.000000
10/7/2012	12:57:35 PM	H2 MFC set to  500.000000
10/7/2012	12:57:35 PM	BCl3 MFC set to  0.000000
10/7/2012	12:57:35 PM	PH3 MFC set to  0.000000
10/7/2012	12:57:35 PM	SiCl4 MFC set to  0.000000
10/7/2012	12:57:35 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	12:57:35 PM	Tube furnace set to 950
10/7/2012	1:12:35 PM	Helium valve closed
10/7/2012	1:12:35 PM	PH3 valve closed
10/7/2012	1:12:35 PM	SiCl4 pre valve closed
10/7/2012	1:12:35 PM	SiCl4 post valve closed
10/7/2012	1:12:35 PM	Main Vac valve closed
10/7/2012	1:12:35 PM	Bypass valve closed
10/7/2012	1:12:35 PM	H2 valve opened
10/7/2012	1:12:35 PM	BCl3 valve opened
10/7/2012	1:12:35 PM	Bubbler valve opened
10/7/2012	1:12:35 PM	Helium MFC set to  0.000000
10/7/2012	1:12:35 PM	H2 MFC set to  400.000000
10/7/2012	1:12:35 PM	BCl3 MFC set to  20.000000
10/7/2012	1:12:35 PM	PH3 MFC set to  0.000000
10/7/2012	1:12:35 PM	SiCl4 MFC set to  0.000000
10/7/2012	1:12:35 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	1:12:35 PM	Tube furnace set to 950
10/7/2012	1:42:35 PM	Helium valve closed
10/7/2012	1:42:35 PM	BCl3 valve closed
10/7/2012	1:42:35 PM	PH3 valve closed
10/7/2012	1:42:35 PM	SiCl4 pre valve closed
10/7/2012	1:42:35 PM	SiCl4 post valve closed
10/7/2012	1:42:35 PM	Main Vac valve closed
10/7/2012	1:42:35 PM	Bypass valve closed
10/7/2012	1:42:35 PM	H2 valve opened
10/7/2012	1:42:35 PM	Bubbler valve opened
10/7/2012	1:42:35 PM	Helium MFC set to  0.000000
10/7/2012	1:42:35 PM	H2 MFC set to  500.000000
10/7/2012	1:42:35 PM	BCl3 MFC set to  0.000000
10/7/2012	1:42:35 PM	PH3 MFC set to  0.000000
10/7/2012	1:42:35 PM	SiCl4 MFC set to  0.000000
10/7/2012	1:42:35 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	1:42:36 PM	Tube furnace set to 750
10/7/2012	1:47:36 PM	H2 valve closed
10/7/2012	1:47:36 PM	BCl3 valve closed
10/7/2012	1:47:36 PM	PH3 valve closed
10/7/2012	1:47:36 PM	SiCl4 pre valve closed
10/7/2012	1:47:36 PM	SiCl4 post valve closed
10/7/2012	1:47:36 PM	Main Vac valve closed
10/7/2012	1:47:36 PM	Bypass valve closed
10/7/2012	1:47:36 PM	Helium valve opened
10/7/2012	1:47:36 PM	Bubbler valve opened
10/7/2012	1:47:36 PM	Helium MFC set to  500.000000
10/7/2012	1:47:36 PM	H2 MFC set to  0.000000
10/7/2012	1:47:36 PM	BCl3 MFC set to  0.000000
10/7/2012	1:47:36 PM	PH3 MFC set to  0.000000
10/7/2012	1:47:36 PM	SiCl4 MFC set to  0.000000
10/7/2012	1:47:36 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	1:47:36 PM	Tube furnace set to 0
10/7/2012	2:07:36 PM	Helium valve closed
10/7/2012	2:07:36 PM	H2 valve closed
10/7/2012	2:07:36 PM	BCl3 valve closed
10/7/2012	2:07:36 PM	PH3 valve closed
10/7/2012	2:07:36 PM	SiCl4 pre valve closed
10/7/2012	2:07:36 PM	SiCl4 post valve closed
10/7/2012	2:07:36 PM	Main Vac valve closed
10/7/2012	2:07:36 PM	Bypass valve closed
10/7/2012	2:07:36 PM	Bubbler valve closed
10/7/2012	2:07:36 PM	Helium MFC set to  0.000000
10/7/2012	2:07:36 PM	H2 MFC set to  0.000000
10/7/2012	2:07:36 PM	BCl3 MFC set to  0.000000
10/7/2012	2:07:36 PM	PH3 MFC set to  0.000000
10/7/2012	2:07:36 PM	SiCl4 MFC set to  0.000000
10/7/2012	2:07:36 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	2:07:36 PM	Tube furnace set to 0
10/7/2012	2:07:37 PM	Run finished at 2:07 PM
10/7/2012	2:18:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2012	2:18:17 PM	Recipe started at 2:18 PM
10/7/2012	2:18:17 PM	Helium valve closed
10/7/2012	2:18:17 PM	H2 valve closed
10/7/2012	2:18:17 PM	BCl3 valve closed
10/7/2012	2:18:17 PM	PH3 valve closed
10/7/2012	2:18:17 PM	SiCl4 pre valve closed
10/7/2012	2:18:17 PM	SiCl4 post valve closed
10/7/2012	2:18:17 PM	Main Vac valve closed
10/7/2012	2:18:17 PM	Bypass valve closed
10/7/2012	2:18:17 PM	Bubbler valve closed
10/7/2012	2:18:17 PM	Helium MFC set to  0.000000
10/7/2012	2:18:17 PM	H2 MFC set to  0.000000
10/7/2012	2:18:17 PM	BCl3 MFC set to  0.000000
10/7/2012	2:18:17 PM	PH3 MFC set to  0.000000
10/7/2012	2:18:17 PM	SiCl4 MFC set to  0.000000
10/7/2012	2:18:17 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	2:18:17 PM	Tube furnace set to 0
10/7/2012	2:18:20 PM	H2 valve closed
10/7/2012	2:18:20 PM	BCl3 valve closed
10/7/2012	2:18:20 PM	PH3 valve closed
10/7/2012	2:18:20 PM	SiCl4 pre valve closed
10/7/2012	2:18:20 PM	SiCl4 post valve closed
10/7/2012	2:18:20 PM	Main Vac valve closed
10/7/2012	2:18:20 PM	Bypass valve closed
10/7/2012	2:18:20 PM	Bubbler valve closed
10/7/2012	2:18:20 PM	Helium valve opened
10/7/2012	2:18:20 PM	Helium MFC set to  500.000000
10/7/2012	2:18:20 PM	H2 MFC set to  0.000000
10/7/2012	2:18:20 PM	BCl3 MFC set to  0.000000
10/7/2012	2:18:20 PM	PH3 MFC set to  0.000000
10/7/2012	2:18:20 PM	SiCl4 MFC set to  0.000000
10/7/2012	2:18:20 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	2:18:21 PM	Tube furnace set to 0
10/7/2012	2:18:21 PM	Helium valve closed
10/7/2012	2:18:21 PM	H2 valve closed
10/7/2012	2:18:21 PM	BCl3 valve closed
10/7/2012	2:18:21 PM	PH3 valve closed
10/7/2012	2:18:21 PM	SiCl4 pre valve closed
10/7/2012	2:18:21 PM	SiCl4 post valve closed
10/7/2012	2:18:21 PM	Main Vac valve closed
10/7/2012	2:18:21 PM	Bypass valve closed
10/7/2012	2:18:21 PM	Bubbler valve closed
10/7/2012	2:18:21 PM	Helium MFC set to  0.000000
10/7/2012	2:18:21 PM	H2 MFC set to  0.000000
10/7/2012	2:18:21 PM	BCl3 MFC set to  0.000000
10/7/2012	2:18:21 PM	PH3 MFC set to  0.000000
10/7/2012	2:18:21 PM	SiCl4 MFC set to  0.000000
10/7/2012	2:18:21 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	2:18:21 PM	Tube furnace set to 0
10/7/2012	2:18:22 PM	Run finished at 2:18 PM
10/7/2012	2:18:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2012	2:24:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	2:24:23 PM	Recipe started at 2:24 PM
10/7/2012	2:24:23 PM	Helium valve closed
10/7/2012	2:24:23 PM	H2 valve closed
10/7/2012	2:24:23 PM	BCl3 valve closed
10/7/2012	2:24:23 PM	PH3 valve closed
10/7/2012	2:24:23 PM	SiCl4 pre valve closed
10/7/2012	2:24:23 PM	SiCl4 post valve closed
10/7/2012	2:24:23 PM	Main Vac valve closed
10/7/2012	2:24:23 PM	Bubbler valve closed
10/7/2012	2:24:23 PM	Bypass valve opened
10/7/2012	2:24:23 PM	Helium MFC set to  0.000000
10/7/2012	2:24:23 PM	H2 MFC set to  0.000000
10/7/2012	2:24:23 PM	BCl3 MFC set to  0.000000
10/7/2012	2:24:23 PM	PH3 MFC set to  0.000000
10/7/2012	2:24:23 PM	SiCl4 MFC set to  0.000000
10/7/2012	2:24:23 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	2:24:24 PM	Tube furnace set to 0
10/7/2012	2:26:14 PM	Helium valve closed
10/7/2012	2:26:14 PM	H2 valve closed
10/7/2012	2:26:14 PM	BCl3 valve closed
10/7/2012	2:26:14 PM	PH3 valve closed
10/7/2012	2:26:14 PM	SiCl4 pre valve closed
10/7/2012	2:26:14 PM	SiCl4 post valve closed
10/7/2012	2:26:14 PM	Main Vac valve closed
10/7/2012	2:26:14 PM	Bubbler valve closed
10/7/2012	2:26:14 PM	Bypass valve opened
10/7/2012	2:26:14 PM	Helium MFC set to  0.000000
10/7/2012	2:26:14 PM	H2 MFC set to  0.000000
10/7/2012	2:26:14 PM	BCl3 MFC set to  0.000000
10/7/2012	2:26:14 PM	PH3 MFC set to  0.000000
10/7/2012	2:26:14 PM	SiCl4 MFC set to  0.000000
10/7/2012	2:26:14 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	2:26:15 PM	Tube furnace set to 0
10/7/2012	2:27:15 PM	Helium valve closed
10/7/2012	2:27:15 PM	H2 valve closed
10/7/2012	2:27:15 PM	BCl3 valve closed
10/7/2012	2:27:15 PM	PH3 valve closed
10/7/2012	2:27:15 PM	SiCl4 pre valve closed
10/7/2012	2:27:15 PM	SiCl4 post valve closed
10/7/2012	2:27:15 PM	Bypass valve closed
10/7/2012	2:27:15 PM	Bubbler valve closed
10/7/2012	2:27:15 PM	Main Vac valve opened
10/7/2012	2:27:15 PM	Helium MFC set to  0.000000
10/7/2012	2:27:15 PM	H2 MFC set to  0.000000
10/7/2012	2:27:15 PM	BCl3 MFC set to  0.000000
10/7/2012	2:27:15 PM	PH3 MFC set to  0.000000
10/7/2012	2:27:15 PM	SiCl4 MFC set to  0.000000
10/7/2012	2:27:15 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	2:27:15 PM	Tube furnace set to 0
10/7/2012	2:27:16 PM	Run finished at 2:27 PM
10/7/2012	2:27:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	2:28:03 PM	Helium MFC set to  20.000000
10/7/2012	2:28:05 PM	Helium valve opened
10/7/2012	2:30:03 PM	Helium valve closed
10/7/2012	2:30:30 PM	Helium valve opened
10/7/2012	2:32:36 PM	Helium valve closed
10/7/2012	2:32:40 PM	Helium MFC set to  0.000000
10/7/2012	2:32:56 PM	Main Vac valve closed
10/7/2012	2:33:03 PM	Main Vac valve opened
10/7/2012	2:33:19 PM	Helium MFC set to  20.000000
10/7/2012	2:33:22 PM	Helium valve opened
10/7/2012	2:33:46 PM	Helium valve closed
10/7/2012	2:34:05 PM	Main Vac valve closed
10/7/2012	2:34:09 PM	Main Vac valve opened
10/7/2012	2:35:56 PM	Recipe started at 2:35 PM
10/7/2012	2:35:56 PM	Helium valve closed
10/7/2012	2:35:56 PM	H2 valve closed
10/7/2012	2:35:56 PM	BCl3 valve closed
10/7/2012	2:35:56 PM	PH3 valve closed
10/7/2012	2:35:56 PM	SiCl4 pre valve closed
10/7/2012	2:35:56 PM	SiCl4 post valve closed
10/7/2012	2:35:56 PM	Main Vac valve closed
10/7/2012	2:35:56 PM	Bypass valve closed
10/7/2012	2:35:56 PM	Bubbler valve closed
10/7/2012	2:35:56 PM	Helium MFC set to  0.000000
10/7/2012	2:35:56 PM	H2 MFC set to  0.000000
10/7/2012	2:35:56 PM	BCl3 MFC set to  0.000000
10/7/2012	2:35:56 PM	PH3 MFC set to  0.000000
10/7/2012	2:35:56 PM	SiCl4 MFC set to  0.000000
10/7/2012	2:35:56 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	2:35:56 PM	Tube furnace set to 0
10/7/2012	2:35:59 PM	Helium valve closed
10/7/2012	2:35:59 PM	BCl3 valve closed
10/7/2012	2:35:59 PM	PH3 valve closed
10/7/2012	2:35:59 PM	SiCl4 pre valve closed
10/7/2012	2:35:59 PM	SiCl4 post valve closed
10/7/2012	2:35:59 PM	Main Vac valve closed
10/7/2012	2:35:59 PM	Bypass valve closed
10/7/2012	2:35:59 PM	Bubbler valve closed
10/7/2012	2:35:59 PM	H2 valve opened
10/7/2012	2:35:59 PM	Helium MFC set to  0.000000
10/7/2012	2:35:59 PM	H2 MFC set to  500.000000
10/7/2012	2:35:59 PM	BCl3 MFC set to  0.000000
10/7/2012	2:35:59 PM	PH3 MFC set to  0.000000
10/7/2012	2:35:59 PM	SiCl4 MFC set to  0.000000
10/7/2012	2:35:59 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	2:35:59 PM	Tube furnace set to 0
10/7/2012	2:37:10 PM	Helium valve closed
10/7/2012	2:37:10 PM	BCl3 valve closed
10/7/2012	2:37:10 PM	PH3 valve closed
10/7/2012	2:37:10 PM	SiCl4 pre valve closed
10/7/2012	2:37:10 PM	SiCl4 post valve closed
10/7/2012	2:37:10 PM	Main Vac valve closed
10/7/2012	2:37:10 PM	Bypass valve closed
10/7/2012	2:37:10 PM	H2 valve opened
10/7/2012	2:37:10 PM	Bubbler valve opened
10/7/2012	2:37:10 PM	Helium MFC set to  0.000000
10/7/2012	2:37:10 PM	H2 MFC set to  500.000000
10/7/2012	2:37:10 PM	BCl3 MFC set to  0.000000
10/7/2012	2:37:10 PM	PH3 MFC set to  0.000000
10/7/2012	2:37:10 PM	SiCl4 MFC set to  0.000000
10/7/2012	2:37:10 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	2:37:10 PM	Tube furnace set to 0
10/7/2012	2:37:11 PM	Helium valve closed
10/7/2012	2:37:11 PM	BCl3 valve closed
10/7/2012	2:37:11 PM	PH3 valve closed
10/7/2012	2:37:11 PM	SiCl4 pre valve closed
10/7/2012	2:37:11 PM	SiCl4 post valve closed
10/7/2012	2:37:11 PM	Main Vac valve closed
10/7/2012	2:37:11 PM	Bypass valve closed
10/7/2012	2:37:11 PM	H2 valve opened
10/7/2012	2:37:11 PM	Bubbler valve opened
10/7/2012	2:37:11 PM	Helium MFC set to  0.000000
10/7/2012	2:37:11 PM	H2 MFC set to  500.000000
10/7/2012	2:37:11 PM	BCl3 MFC set to  0.000000
10/7/2012	2:37:11 PM	PH3 MFC set to  0.000000
10/7/2012	2:37:11 PM	SiCl4 MFC set to  0.000000
10/7/2012	2:37:11 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	2:37:11 PM	Tube furnace set to 950
10/7/2012	2:52:11 PM	Helium valve closed
10/7/2012	2:52:11 PM	PH3 valve closed
10/7/2012	2:52:11 PM	SiCl4 pre valve closed
10/7/2012	2:52:11 PM	SiCl4 post valve closed
10/7/2012	2:52:11 PM	Main Vac valve closed
10/7/2012	2:52:11 PM	Bypass valve closed
10/7/2012	2:52:11 PM	H2 valve opened
10/7/2012	2:52:11 PM	BCl3 valve opened
10/7/2012	2:52:11 PM	Bubbler valve opened
10/7/2012	2:52:12 PM	Helium MFC set to  0.000000
10/7/2012	2:52:12 PM	H2 MFC set to  400.000000
10/7/2012	2:52:12 PM	BCl3 MFC set to  20.000000
10/7/2012	2:52:12 PM	PH3 MFC set to  0.000000
10/7/2012	2:52:12 PM	SiCl4 MFC set to  0.000000
10/7/2012	2:52:12 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	2:52:12 PM	Tube furnace set to 950
10/7/2012	3:22:12 PM	Helium valve closed
10/7/2012	3:22:12 PM	BCl3 valve closed
10/7/2012	3:22:12 PM	PH3 valve closed
10/7/2012	3:22:12 PM	SiCl4 pre valve closed
10/7/2012	3:22:12 PM	SiCl4 post valve closed
10/7/2012	3:22:12 PM	Main Vac valve closed
10/7/2012	3:22:12 PM	Bypass valve closed
10/7/2012	3:22:12 PM	H2 valve opened
10/7/2012	3:22:12 PM	Bubbler valve opened
10/7/2012	3:22:12 PM	Helium MFC set to  0.000000
10/7/2012	3:22:12 PM	H2 MFC set to  500.000000
10/7/2012	3:22:12 PM	BCl3 MFC set to  0.000000
10/7/2012	3:22:12 PM	PH3 MFC set to  0.000000
10/7/2012	3:22:12 PM	SiCl4 MFC set to  0.000000
10/7/2012	3:22:12 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	3:22:12 PM	Tube furnace set to 750
10/7/2012	3:25:00 PM	H2 valve closed
10/7/2012	3:25:00 PM	BCl3 valve closed
10/7/2012	3:25:00 PM	PH3 valve closed
10/7/2012	3:25:00 PM	SiCl4 pre valve closed
10/7/2012	3:25:00 PM	SiCl4 post valve closed
10/7/2012	3:25:00 PM	Main Vac valve closed
10/7/2012	3:25:00 PM	Bypass valve closed
10/7/2012	3:25:00 PM	Helium valve opened
10/7/2012	3:25:00 PM	Bubbler valve opened
10/7/2012	3:25:00 PM	Helium MFC set to  500.000000
10/7/2012	3:25:00 PM	H2 MFC set to  0.000000
10/7/2012	3:25:00 PM	BCl3 MFC set to  0.000000
10/7/2012	3:25:00 PM	PH3 MFC set to  0.000000
10/7/2012	3:25:00 PM	SiCl4 MFC set to  0.000000
10/7/2012	3:25:00 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	3:25:00 PM	Tube furnace set to 0
10/7/2012	3:28:32 PM	Run aborted at 3:28 PM
10/7/2012	3:28:32 PM	Helium valve closed
10/7/2012	3:28:32 PM	H2 valve closed
10/7/2012	3:28:32 PM	BCl3 valve closed
10/7/2012	3:28:32 PM	PH3 valve closed
10/7/2012	3:28:32 PM	SiCl4 pre valve closed
10/7/2012	3:28:32 PM	SiCl4 post valve closed
10/7/2012	3:28:32 PM	Bypass valve closed
10/7/2012	3:28:32 PM	Main Vac valve closed
10/7/2012	3:28:32 PM	Bubbler valve closed
10/7/2012	3:28:32 PM	Helium MFC set to  0.000000
10/7/2012	3:28:32 PM	H2 MFC set to  0.000000
10/7/2012	3:28:32 PM	BCl3 MFC set to  0.000000
10/7/2012	3:28:32 PM	PH3 MFC set to  0.000000
10/7/2012	3:28:32 PM	SiCl4 MFC set to  0.000000
10/7/2012	3:28:33 PM	Tube furnace set to 0
10/7/2012	3:28:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2012	3:28:35 PM	Recipe started at 3:28 PM
10/7/2012	3:28:35 PM	Helium valve closed
10/7/2012	3:28:35 PM	H2 valve closed
10/7/2012	3:28:35 PM	BCl3 valve closed
10/7/2012	3:28:35 PM	PH3 valve closed
10/7/2012	3:28:35 PM	SiCl4 pre valve closed
10/7/2012	3:28:35 PM	SiCl4 post valve closed
10/7/2012	3:28:35 PM	Main Vac valve closed
10/7/2012	3:28:35 PM	Bypass valve closed
10/7/2012	3:28:35 PM	Bubbler valve closed
10/7/2012	3:28:35 PM	Helium MFC set to  0.000000
10/7/2012	3:28:35 PM	H2 MFC set to  0.000000
10/7/2012	3:28:35 PM	BCl3 MFC set to  0.000000
10/7/2012	3:28:35 PM	PH3 MFC set to  0.000000
10/7/2012	3:28:35 PM	SiCl4 MFC set to  0.000000
10/7/2012	3:28:35 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	3:28:35 PM	Tube furnace set to 0
10/7/2012	3:28:38 PM	H2 valve closed
10/7/2012	3:28:38 PM	BCl3 valve closed
10/7/2012	3:28:38 PM	PH3 valve closed
10/7/2012	3:28:38 PM	SiCl4 pre valve closed
10/7/2012	3:28:38 PM	SiCl4 post valve closed
10/7/2012	3:28:38 PM	Main Vac valve closed
10/7/2012	3:28:38 PM	Bypass valve closed
10/7/2012	3:28:38 PM	Bubbler valve closed
10/7/2012	3:28:38 PM	Helium valve opened
10/7/2012	3:28:38 PM	Helium MFC set to  500.000000
10/7/2012	3:28:38 PM	H2 MFC set to  0.000000
10/7/2012	3:28:38 PM	BCl3 MFC set to  0.000000
10/7/2012	3:28:38 PM	PH3 MFC set to  0.000000
10/7/2012	3:28:38 PM	SiCl4 MFC set to  0.000000
10/7/2012	3:28:38 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	3:28:38 PM	Tube furnace set to 0
10/7/2012	3:28:39 PM	Helium valve closed
10/7/2012	3:28:39 PM	H2 valve closed
10/7/2012	3:28:39 PM	BCl3 valve closed
10/7/2012	3:28:39 PM	PH3 valve closed
10/7/2012	3:28:39 PM	SiCl4 pre valve closed
10/7/2012	3:28:39 PM	SiCl4 post valve closed
10/7/2012	3:28:39 PM	Main Vac valve closed
10/7/2012	3:28:39 PM	Bypass valve closed
10/7/2012	3:28:39 PM	Bubbler valve closed
10/7/2012	3:28:39 PM	Helium MFC set to  0.000000
10/7/2012	3:28:39 PM	H2 MFC set to  0.000000
10/7/2012	3:28:39 PM	BCl3 MFC set to  0.000000
10/7/2012	3:28:39 PM	PH3 MFC set to  0.000000
10/7/2012	3:28:39 PM	SiCl4 MFC set to  0.000000
10/7/2012	3:28:39 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	3:28:39 PM	Tube furnace set to 0
10/7/2012	3:28:40 PM	Run finished at 3:28 PM
10/7/2012	3:28:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2012	3:32:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	3:32:13 PM	Recipe started at 3:32 PM
10/7/2012	3:32:13 PM	Helium valve closed
10/7/2012	3:32:13 PM	H2 valve closed
10/7/2012	3:32:13 PM	BCl3 valve closed
10/7/2012	3:32:13 PM	PH3 valve closed
10/7/2012	3:32:13 PM	SiCl4 pre valve closed
10/7/2012	3:32:13 PM	SiCl4 post valve closed
10/7/2012	3:32:13 PM	Main Vac valve closed
10/7/2012	3:32:13 PM	Bubbler valve closed
10/7/2012	3:32:13 PM	Bypass valve opened
10/7/2012	3:32:13 PM	Helium MFC set to  0.000000
10/7/2012	3:32:13 PM	H2 MFC set to  0.000000
10/7/2012	3:32:13 PM	BCl3 MFC set to  0.000000
10/7/2012	3:32:13 PM	PH3 MFC set to  0.000000
10/7/2012	3:32:13 PM	SiCl4 MFC set to  0.000000
10/7/2012	3:32:13 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	3:32:14 PM	Tube furnace set to 0
10/7/2012	3:33:19 PM	Helium valve closed
10/7/2012	3:33:19 PM	H2 valve closed
10/7/2012	3:33:19 PM	BCl3 valve closed
10/7/2012	3:33:19 PM	PH3 valve closed
10/7/2012	3:33:19 PM	SiCl4 pre valve closed
10/7/2012	3:33:19 PM	SiCl4 post valve closed
10/7/2012	3:33:19 PM	Main Vac valve closed
10/7/2012	3:33:19 PM	Bubbler valve closed
10/7/2012	3:33:19 PM	Bypass valve opened
10/7/2012	3:33:19 PM	Helium MFC set to  0.000000
10/7/2012	3:33:19 PM	H2 MFC set to  0.000000
10/7/2012	3:33:19 PM	BCl3 MFC set to  0.000000
10/7/2012	3:33:19 PM	PH3 MFC set to  0.000000
10/7/2012	3:33:19 PM	SiCl4 MFC set to  0.000000
10/7/2012	3:33:19 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	3:33:19 PM	Tube furnace set to 0
10/7/2012	3:34:19 PM	Helium valve closed
10/7/2012	3:34:19 PM	H2 valve closed
10/7/2012	3:34:19 PM	BCl3 valve closed
10/7/2012	3:34:19 PM	PH3 valve closed
10/7/2012	3:34:19 PM	SiCl4 pre valve closed
10/7/2012	3:34:19 PM	SiCl4 post valve closed
10/7/2012	3:34:19 PM	Bypass valve closed
10/7/2012	3:34:19 PM	Bubbler valve closed
10/7/2012	3:34:19 PM	Main Vac valve opened
10/7/2012	3:34:19 PM	Helium MFC set to  0.000000
10/7/2012	3:34:19 PM	H2 MFC set to  0.000000
10/7/2012	3:34:19 PM	BCl3 MFC set to  0.000000
10/7/2012	3:34:19 PM	PH3 MFC set to  0.000000
10/7/2012	3:34:19 PM	SiCl4 MFC set to  0.000000
10/7/2012	3:34:19 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	3:34:20 PM	Tube furnace set to 0
10/7/2012	3:34:21 PM	Run finished at 3:34 PM
10/7/2012	3:34:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	3:34:30 PM	Helium MFC set to  20.000000
10/7/2012	3:36:16 PM	Helium valve opened
10/7/2012	3:38:01 PM	Helium valve closed
10/7/2012	3:38:23 PM	Main Vac valve closed
10/7/2012	3:38:28 PM	Main Vac valve opened
10/7/2012	3:38:41 PM	Helium valve opened
10/7/2012	3:40:16 PM	Helium valve closed
10/7/2012	3:42:38 PM	Recipe started at 3:42 PM
10/7/2012	3:42:38 PM	Helium valve closed
10/7/2012	3:42:38 PM	H2 valve closed
10/7/2012	3:42:38 PM	BCl3 valve closed
10/7/2012	3:42:38 PM	PH3 valve closed
10/7/2012	3:42:38 PM	SiCl4 pre valve closed
10/7/2012	3:42:38 PM	SiCl4 post valve closed
10/7/2012	3:42:38 PM	Main Vac valve closed
10/7/2012	3:42:38 PM	Bypass valve closed
10/7/2012	3:42:38 PM	Bubbler valve closed
10/7/2012	3:42:38 PM	Helium MFC set to  0.000000
10/7/2012	3:42:38 PM	H2 MFC set to  0.000000
10/7/2012	3:42:38 PM	BCl3 MFC set to  0.000000
10/7/2012	3:42:38 PM	PH3 MFC set to  0.000000
10/7/2012	3:42:38 PM	SiCl4 MFC set to  0.000000
10/7/2012	3:42:38 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	3:42:38 PM	Tube furnace set to 0
10/7/2012	3:42:41 PM	Helium valve closed
10/7/2012	3:42:41 PM	BCl3 valve closed
10/7/2012	3:42:41 PM	PH3 valve closed
10/7/2012	3:42:41 PM	SiCl4 pre valve closed
10/7/2012	3:42:41 PM	SiCl4 post valve closed
10/7/2012	3:42:41 PM	Main Vac valve closed
10/7/2012	3:42:41 PM	Bypass valve closed
10/7/2012	3:42:41 PM	Bubbler valve closed
10/7/2012	3:42:41 PM	H2 valve opened
10/7/2012	3:42:41 PM	Helium MFC set to  0.000000
10/7/2012	3:42:41 PM	H2 MFC set to  500.000000
10/7/2012	3:42:41 PM	BCl3 MFC set to  0.000000
10/7/2012	3:42:41 PM	PH3 MFC set to  0.000000
10/7/2012	3:42:41 PM	SiCl4 MFC set to  0.000000
10/7/2012	3:42:41 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	3:42:41 PM	Tube furnace set to 0
10/7/2012	3:43:48 PM	Helium valve closed
10/7/2012	3:43:48 PM	BCl3 valve closed
10/7/2012	3:43:48 PM	PH3 valve closed
10/7/2012	3:43:48 PM	SiCl4 pre valve closed
10/7/2012	3:43:48 PM	SiCl4 post valve closed
10/7/2012	3:43:48 PM	Main Vac valve closed
10/7/2012	3:43:48 PM	Bypass valve closed
10/7/2012	3:43:48 PM	H2 valve opened
10/7/2012	3:43:48 PM	Bubbler valve opened
10/7/2012	3:43:48 PM	Helium MFC set to  0.000000
10/7/2012	3:43:48 PM	H2 MFC set to  500.000000
10/7/2012	3:43:48 PM	BCl3 MFC set to  0.000000
10/7/2012	3:43:48 PM	PH3 MFC set to  0.000000
10/7/2012	3:43:48 PM	SiCl4 MFC set to  0.000000
10/7/2012	3:43:48 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	3:43:48 PM	Tube furnace set to 0
10/7/2012	3:43:49 PM	Helium valve closed
10/7/2012	3:43:49 PM	BCl3 valve closed
10/7/2012	3:43:49 PM	PH3 valve closed
10/7/2012	3:43:49 PM	SiCl4 pre valve closed
10/7/2012	3:43:49 PM	SiCl4 post valve closed
10/7/2012	3:43:49 PM	Main Vac valve closed
10/7/2012	3:43:49 PM	Bypass valve closed
10/7/2012	3:43:49 PM	H2 valve opened
10/7/2012	3:43:49 PM	Bubbler valve opened
10/7/2012	3:43:49 PM	Helium MFC set to  0.000000
10/7/2012	3:43:49 PM	H2 MFC set to  500.000000
10/7/2012	3:43:49 PM	BCl3 MFC set to  0.000000
10/7/2012	3:43:49 PM	PH3 MFC set to  0.000000
10/7/2012	3:43:49 PM	SiCl4 MFC set to  0.000000
10/7/2012	3:43:49 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	3:43:49 PM	Tube furnace set to 950
10/7/2012	3:58:49 PM	Helium valve closed
10/7/2012	3:58:49 PM	PH3 valve closed
10/7/2012	3:58:49 PM	SiCl4 pre valve closed
10/7/2012	3:58:49 PM	SiCl4 post valve closed
10/7/2012	3:58:49 PM	Main Vac valve closed
10/7/2012	3:58:49 PM	Bypass valve closed
10/7/2012	3:58:49 PM	H2 valve opened
10/7/2012	3:58:49 PM	BCl3 valve opened
10/7/2012	3:58:49 PM	Bubbler valve opened
10/7/2012	3:58:49 PM	Helium MFC set to  0.000000
10/7/2012	3:58:49 PM	H2 MFC set to  400.000000
10/7/2012	3:58:49 PM	BCl3 MFC set to  20.000000
10/7/2012	3:58:49 PM	PH3 MFC set to  0.000000
10/7/2012	3:58:49 PM	SiCl4 MFC set to  0.000000
10/7/2012	3:58:49 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	3:58:49 PM	Tube furnace set to 950
10/7/2012	4:28:49 PM	Helium valve closed
10/7/2012	4:28:49 PM	BCl3 valve closed
10/7/2012	4:28:49 PM	PH3 valve closed
10/7/2012	4:28:49 PM	SiCl4 pre valve closed
10/7/2012	4:28:49 PM	SiCl4 post valve closed
10/7/2012	4:28:49 PM	Main Vac valve closed
10/7/2012	4:28:49 PM	Bypass valve closed
10/7/2012	4:28:49 PM	H2 valve opened
10/7/2012	4:28:49 PM	Bubbler valve opened
10/7/2012	4:28:49 PM	Helium MFC set to  0.000000
10/7/2012	4:28:49 PM	H2 MFC set to  500.000000
10/7/2012	4:28:49 PM	BCl3 MFC set to  0.000000
10/7/2012	4:28:49 PM	PH3 MFC set to  0.000000
10/7/2012	4:28:49 PM	SiCl4 MFC set to  0.000000
10/7/2012	4:28:49 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	4:28:49 PM	Tube furnace set to 750
10/7/2012	4:30:44 PM	H2 valve closed
10/7/2012	4:30:44 PM	BCl3 valve closed
10/7/2012	4:30:44 PM	PH3 valve closed
10/7/2012	4:30:44 PM	SiCl4 pre valve closed
10/7/2012	4:30:44 PM	SiCl4 post valve closed
10/7/2012	4:30:44 PM	Main Vac valve closed
10/7/2012	4:30:44 PM	Bypass valve closed
10/7/2012	4:30:44 PM	Helium valve opened
10/7/2012	4:30:44 PM	Bubbler valve opened
10/7/2012	4:30:44 PM	Helium MFC set to  500.000000
10/7/2012	4:30:44 PM	H2 MFC set to  0.000000
10/7/2012	4:30:44 PM	BCl3 MFC set to  0.000000
10/7/2012	4:30:44 PM	PH3 MFC set to  0.000000
10/7/2012	4:30:44 PM	SiCl4 MFC set to  0.000000
10/7/2012	4:30:44 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	4:30:44 PM	Tube furnace set to 0
10/7/2012	4:33:17 PM	Helium valve closed
10/7/2012	4:33:17 PM	H2 valve closed
10/7/2012	4:33:17 PM	BCl3 valve closed
10/7/2012	4:33:17 PM	PH3 valve closed
10/7/2012	4:33:17 PM	SiCl4 pre valve closed
10/7/2012	4:33:17 PM	SiCl4 post valve closed
10/7/2012	4:33:17 PM	Main Vac valve closed
10/7/2012	4:33:17 PM	Bypass valve closed
10/7/2012	4:33:17 PM	Bubbler valve closed
10/7/2012	4:33:17 PM	Helium MFC set to  0.000000
10/7/2012	4:33:17 PM	H2 MFC set to  0.000000
10/7/2012	4:33:17 PM	BCl3 MFC set to  0.000000
10/7/2012	4:33:18 PM	PH3 MFC set to  0.000000
10/7/2012	4:33:18 PM	SiCl4 MFC set to  0.000000
10/7/2012	4:33:18 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	4:33:18 PM	Tube furnace set to 0
10/7/2012	4:33:19 PM	Run finished at 4:33 PM
10/7/2012	4:33:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2012	4:33:22 PM	Recipe started at 4:33 PM
10/7/2012	4:33:23 PM	Helium valve closed
10/7/2012	4:33:23 PM	H2 valve closed
10/7/2012	4:33:23 PM	BCl3 valve closed
10/7/2012	4:33:23 PM	PH3 valve closed
10/7/2012	4:33:23 PM	SiCl4 pre valve closed
10/7/2012	4:33:23 PM	SiCl4 post valve closed
10/7/2012	4:33:23 PM	Main Vac valve closed
10/7/2012	4:33:23 PM	Bypass valve closed
10/7/2012	4:33:23 PM	Bubbler valve closed
10/7/2012	4:33:23 PM	Helium MFC set to  0.000000
10/7/2012	4:33:23 PM	H2 MFC set to  0.000000
10/7/2012	4:33:23 PM	BCl3 MFC set to  0.000000
10/7/2012	4:33:23 PM	PH3 MFC set to  0.000000
10/7/2012	4:33:23 PM	SiCl4 MFC set to  0.000000
10/7/2012	4:33:23 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	4:33:23 PM	Tube furnace set to 0
10/7/2012	4:33:26 PM	H2 valve closed
10/7/2012	4:33:26 PM	BCl3 valve closed
10/7/2012	4:33:26 PM	PH3 valve closed
10/7/2012	4:33:26 PM	SiCl4 pre valve closed
10/7/2012	4:33:26 PM	SiCl4 post valve closed
10/7/2012	4:33:26 PM	Main Vac valve closed
10/7/2012	4:33:26 PM	Bypass valve closed
10/7/2012	4:33:26 PM	Bubbler valve closed
10/7/2012	4:33:26 PM	Helium valve opened
10/7/2012	4:33:26 PM	Helium MFC set to  500.000000
10/7/2012	4:33:26 PM	H2 MFC set to  0.000000
10/7/2012	4:33:26 PM	BCl3 MFC set to  0.000000
10/7/2012	4:33:26 PM	PH3 MFC set to  0.000000
10/7/2012	4:33:26 PM	SiCl4 MFC set to  0.000000
10/7/2012	4:33:26 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	4:33:26 PM	Tube furnace set to 0
10/7/2012	4:33:26 PM	Helium valve closed
10/7/2012	4:33:26 PM	H2 valve closed
10/7/2012	4:33:26 PM	BCl3 valve closed
10/7/2012	4:33:26 PM	PH3 valve closed
10/7/2012	4:33:26 PM	SiCl4 pre valve closed
10/7/2012	4:33:26 PM	SiCl4 post valve closed
10/7/2012	4:33:26 PM	Main Vac valve closed
10/7/2012	4:33:26 PM	Bypass valve closed
10/7/2012	4:33:26 PM	Bubbler valve closed
10/7/2012	4:33:26 PM	Helium MFC set to  0.000000
10/7/2012	4:33:26 PM	H2 MFC set to  0.000000
10/7/2012	4:33:26 PM	BCl3 MFC set to  0.000000
10/7/2012	4:33:26 PM	PH3 MFC set to  0.000000
10/7/2012	4:33:26 PM	SiCl4 MFC set to  0.000000
10/7/2012	4:33:26 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	4:33:26 PM	Tube furnace set to 0
10/7/2012	4:33:27 PM	Run finished at 4:33 PM
10/7/2012	4:33:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2012	4:37:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	4:37:02 PM	Recipe started at 4:37 PM
10/7/2012	4:37:02 PM	Helium valve closed
10/7/2012	4:37:02 PM	H2 valve closed
10/7/2012	4:37:02 PM	BCl3 valve closed
10/7/2012	4:37:02 PM	PH3 valve closed
10/7/2012	4:37:02 PM	SiCl4 pre valve closed
10/7/2012	4:37:02 PM	SiCl4 post valve closed
10/7/2012	4:37:02 PM	Main Vac valve closed
10/7/2012	4:37:02 PM	Bubbler valve closed
10/7/2012	4:37:02 PM	Bypass valve opened
10/7/2012	4:37:02 PM	Helium MFC set to  0.000000
10/7/2012	4:37:02 PM	H2 MFC set to  0.000000
10/7/2012	4:37:02 PM	BCl3 MFC set to  0.000000
10/7/2012	4:37:02 PM	PH3 MFC set to  0.000000
10/7/2012	4:37:02 PM	SiCl4 MFC set to  0.000000
10/7/2012	4:37:02 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	4:37:02 PM	Tube furnace set to 0
10/7/2012	4:38:53 PM	Helium valve closed
10/7/2012	4:38:53 PM	H2 valve closed
10/7/2012	4:38:53 PM	BCl3 valve closed
10/7/2012	4:38:53 PM	PH3 valve closed
10/7/2012	4:38:53 PM	SiCl4 pre valve closed
10/7/2012	4:38:53 PM	SiCl4 post valve closed
10/7/2012	4:38:53 PM	Main Vac valve closed
10/7/2012	4:38:53 PM	Bubbler valve closed
10/7/2012	4:38:53 PM	Bypass valve opened
10/7/2012	4:38:53 PM	Helium MFC set to  0.000000
10/7/2012	4:38:53 PM	H2 MFC set to  0.000000
10/7/2012	4:38:53 PM	BCl3 MFC set to  0.000000
10/7/2012	4:38:53 PM	PH3 MFC set to  0.000000
10/7/2012	4:38:53 PM	SiCl4 MFC set to  0.000000
10/7/2012	4:38:53 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	4:38:53 PM	Tube furnace set to 0
10/7/2012	4:38:54 PM	Helium valve closed
10/7/2012	4:38:54 PM	H2 valve closed
10/7/2012	4:38:54 PM	BCl3 valve closed
10/7/2012	4:38:54 PM	PH3 valve closed
10/7/2012	4:38:54 PM	SiCl4 pre valve closed
10/7/2012	4:38:54 PM	SiCl4 post valve closed
10/7/2012	4:38:54 PM	Bypass valve closed
10/7/2012	4:38:54 PM	Bubbler valve closed
10/7/2012	4:38:54 PM	Main Vac valve opened
10/7/2012	4:38:54 PM	Helium MFC set to  0.000000
10/7/2012	4:38:54 PM	H2 MFC set to  0.000000
10/7/2012	4:38:54 PM	BCl3 MFC set to  0.000000
10/7/2012	4:38:54 PM	PH3 MFC set to  0.000000
10/7/2012	4:38:54 PM	SiCl4 MFC set to  0.000000
10/7/2012	4:38:54 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	4:38:55 PM	Tube furnace set to 0
10/7/2012	4:38:56 PM	Run finished at 4:38 PM
10/7/2012	4:38:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	4:39:08 PM	Helium MFC set to  20.000000
10/7/2012	4:39:13 PM	Helium valve opened
10/7/2012	4:43:03 PM	Helium valve closed
10/7/2012	4:43:05 PM	Helium MFC set to  20.000000
10/7/2012	4:43:21 PM	Main Vac valve closed
10/7/2012	4:43:25 PM	Main Vac valve opened
10/7/2012	4:43:37 PM	Main Vac valve closed
10/7/2012	4:43:39 PM	Main Vac valve opened
10/7/2012	4:43:42 PM	Helium valve opened
10/7/2012	4:44:04 PM	Helium valve closed
10/7/2012	4:44:06 PM	Helium MFC set to  0.000000
10/7/2012	4:44:46 PM	Recipe started at 4:44 PM
10/7/2012	4:44:46 PM	Helium valve closed
10/7/2012	4:44:46 PM	H2 valve closed
10/7/2012	4:44:46 PM	BCl3 valve closed
10/7/2012	4:44:46 PM	PH3 valve closed
10/7/2012	4:44:46 PM	SiCl4 pre valve closed
10/7/2012	4:44:46 PM	SiCl4 post valve closed
10/7/2012	4:44:46 PM	Main Vac valve closed
10/7/2012	4:44:46 PM	Bypass valve closed
10/7/2012	4:44:46 PM	Bubbler valve closed
10/7/2012	4:44:46 PM	Helium MFC set to  0.000000
10/7/2012	4:44:46 PM	H2 MFC set to  0.000000
10/7/2012	4:44:46 PM	BCl3 MFC set to  0.000000
10/7/2012	4:44:46 PM	PH3 MFC set to  0.000000
10/7/2012	4:44:46 PM	SiCl4 MFC set to  0.000000
10/7/2012	4:44:46 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	4:44:46 PM	Tube furnace set to 0
10/7/2012	4:44:49 PM	Helium valve closed
10/7/2012	4:44:49 PM	BCl3 valve closed
10/7/2012	4:44:49 PM	PH3 valve closed
10/7/2012	4:44:49 PM	SiCl4 pre valve closed
10/7/2012	4:44:49 PM	SiCl4 post valve closed
10/7/2012	4:44:49 PM	Main Vac valve closed
10/7/2012	4:44:49 PM	Bypass valve closed
10/7/2012	4:44:49 PM	Bubbler valve closed
10/7/2012	4:44:49 PM	H2 valve opened
10/7/2012	4:44:49 PM	Helium MFC set to  0.000000
10/7/2012	4:44:49 PM	H2 MFC set to  500.000000
10/7/2012	4:44:49 PM	BCl3 MFC set to  0.000000
10/7/2012	4:44:49 PM	PH3 MFC set to  0.000000
10/7/2012	4:44:49 PM	SiCl4 MFC set to  0.000000
10/7/2012	4:44:49 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	4:44:49 PM	Tube furnace set to 0
10/7/2012	4:45:55 PM	Helium valve closed
10/7/2012	4:45:55 PM	BCl3 valve closed
10/7/2012	4:45:55 PM	PH3 valve closed
10/7/2012	4:45:55 PM	SiCl4 pre valve closed
10/7/2012	4:45:55 PM	SiCl4 post valve closed
10/7/2012	4:45:55 PM	Main Vac valve closed
10/7/2012	4:45:55 PM	Bypass valve closed
10/7/2012	4:45:56 PM	H2 valve opened
10/7/2012	4:45:56 PM	Bubbler valve opened
10/7/2012	4:45:56 PM	Helium MFC set to  0.000000
10/7/2012	4:45:56 PM	H2 MFC set to  500.000000
10/7/2012	4:45:56 PM	BCl3 MFC set to  0.000000
10/7/2012	4:45:56 PM	PH3 MFC set to  0.000000
10/7/2012	4:45:56 PM	SiCl4 MFC set to  0.000000
10/7/2012	4:45:56 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	4:45:56 PM	Tube furnace set to 0
10/7/2012	4:45:57 PM	Helium valve closed
10/7/2012	4:45:57 PM	BCl3 valve closed
10/7/2012	4:45:57 PM	PH3 valve closed
10/7/2012	4:45:57 PM	SiCl4 pre valve closed
10/7/2012	4:45:57 PM	SiCl4 post valve closed
10/7/2012	4:45:57 PM	Main Vac valve closed
10/7/2012	4:45:57 PM	Bypass valve closed
10/7/2012	4:45:57 PM	H2 valve opened
10/7/2012	4:45:57 PM	Bubbler valve opened
10/7/2012	4:45:57 PM	Helium MFC set to  0.000000
10/7/2012	4:45:57 PM	H2 MFC set to  500.000000
10/7/2012	4:45:57 PM	BCl3 MFC set to  0.000000
10/7/2012	4:45:57 PM	PH3 MFC set to  0.000000
10/7/2012	4:45:57 PM	SiCl4 MFC set to  0.000000
10/7/2012	4:45:57 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	4:45:57 PM	Tube furnace set to 950
10/7/2012	5:00:57 PM	Helium valve closed
10/7/2012	5:00:57 PM	PH3 valve closed
10/7/2012	5:00:57 PM	SiCl4 pre valve closed
10/7/2012	5:00:57 PM	SiCl4 post valve closed
10/7/2012	5:00:57 PM	Main Vac valve closed
10/7/2012	5:00:57 PM	Bypass valve closed
10/7/2012	5:00:57 PM	H2 valve opened
10/7/2012	5:00:57 PM	BCl3 valve opened
10/7/2012	5:00:57 PM	Bubbler valve opened
10/7/2012	5:00:57 PM	Helium MFC set to  0.000000
10/7/2012	5:00:57 PM	H2 MFC set to  400.000000
10/7/2012	5:00:57 PM	BCl3 MFC set to  20.000000
10/7/2012	5:00:57 PM	PH3 MFC set to  0.000000
10/7/2012	5:00:57 PM	SiCl4 MFC set to  0.000000
10/7/2012	5:00:57 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	5:00:57 PM	Tube furnace set to 950
10/7/2012	5:30:57 PM	Helium valve closed
10/7/2012	5:30:57 PM	BCl3 valve closed
10/7/2012	5:30:57 PM	PH3 valve closed
10/7/2012	5:30:57 PM	SiCl4 pre valve closed
10/7/2012	5:30:57 PM	SiCl4 post valve closed
10/7/2012	5:30:57 PM	Main Vac valve closed
10/7/2012	5:30:57 PM	Bypass valve closed
10/7/2012	5:30:57 PM	H2 valve opened
10/7/2012	5:30:57 PM	Bubbler valve opened
10/7/2012	5:30:57 PM	Helium MFC set to  0.000000
10/7/2012	5:30:57 PM	H2 MFC set to  500.000000
10/7/2012	5:30:57 PM	BCl3 MFC set to  0.000000
10/7/2012	5:30:57 PM	PH3 MFC set to  0.000000
10/7/2012	5:30:57 PM	SiCl4 MFC set to  0.000000
10/7/2012	5:30:57 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	5:30:57 PM	Tube furnace set to 750
10/7/2012	5:35:57 PM	H2 valve closed
10/7/2012	5:35:57 PM	BCl3 valve closed
10/7/2012	5:35:57 PM	PH3 valve closed
10/7/2012	5:35:57 PM	SiCl4 pre valve closed
10/7/2012	5:35:57 PM	SiCl4 post valve closed
10/7/2012	5:35:57 PM	Main Vac valve closed
10/7/2012	5:35:57 PM	Bypass valve closed
10/7/2012	5:35:57 PM	Helium valve opened
10/7/2012	5:35:57 PM	Bubbler valve opened
10/7/2012	5:35:57 PM	Helium MFC set to  500.000000
10/7/2012	5:35:57 PM	H2 MFC set to  0.000000
10/7/2012	5:35:57 PM	BCl3 MFC set to  0.000000
10/7/2012	5:35:57 PM	PH3 MFC set to  0.000000
10/7/2012	5:35:57 PM	SiCl4 MFC set to  0.000000
10/7/2012	5:35:57 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	5:35:58 PM	Tube furnace set to 0
10/7/2012	5:42:34 PM	Helium valve closed
10/7/2012	5:42:34 PM	H2 valve closed
10/7/2012	5:42:34 PM	BCl3 valve closed
10/7/2012	5:42:34 PM	PH3 valve closed
10/7/2012	5:42:34 PM	SiCl4 pre valve closed
10/7/2012	5:42:34 PM	SiCl4 post valve closed
10/7/2012	5:42:34 PM	Main Vac valve closed
10/7/2012	5:42:34 PM	Bypass valve closed
10/7/2012	5:42:34 PM	Bubbler valve closed
10/7/2012	5:42:34 PM	Helium MFC set to  0.000000
10/7/2012	5:42:34 PM	H2 MFC set to  0.000000
10/7/2012	5:42:34 PM	BCl3 MFC set to  0.000000
10/7/2012	5:42:34 PM	PH3 MFC set to  0.000000
10/7/2012	5:42:34 PM	SiCl4 MFC set to  0.000000
10/7/2012	5:42:34 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	5:42:34 PM	Tube furnace set to 0
10/7/2012	5:42:35 PM	Run finished at 5:42 PM
10/7/2012	5:45:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	5:45:07 PM	Recipe started at 5:45 PM
10/7/2012	5:45:07 PM	Helium valve closed
10/7/2012	5:45:07 PM	H2 valve closed
10/7/2012	5:45:07 PM	BCl3 valve closed
10/7/2012	5:45:07 PM	PH3 valve closed
10/7/2012	5:45:07 PM	SiCl4 pre valve closed
10/7/2012	5:45:07 PM	SiCl4 post valve closed
10/7/2012	5:45:07 PM	Main Vac valve closed
10/7/2012	5:45:07 PM	Bubbler valve closed
10/7/2012	5:45:07 PM	Bypass valve opened
10/7/2012	5:45:07 PM	Helium MFC set to  0.000000
10/7/2012	5:45:07 PM	H2 MFC set to  0.000000
10/7/2012	5:45:07 PM	BCl3 MFC set to  0.000000
10/7/2012	5:45:07 PM	PH3 MFC set to  0.000000
10/7/2012	5:45:07 PM	SiCl4 MFC set to  0.000000
10/7/2012	5:45:07 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	5:45:08 PM	Tube furnace set to 0
10/7/2012	5:46:09 PM	Helium valve closed
10/7/2012	5:46:09 PM	H2 valve closed
10/7/2012	5:46:09 PM	BCl3 valve closed
10/7/2012	5:46:09 PM	PH3 valve closed
10/7/2012	5:46:09 PM	SiCl4 pre valve closed
10/7/2012	5:46:09 PM	SiCl4 post valve closed
10/7/2012	5:46:09 PM	Main Vac valve closed
10/7/2012	5:46:09 PM	Bubbler valve closed
10/7/2012	5:46:09 PM	Bypass valve opened
10/7/2012	5:46:09 PM	Helium MFC set to  0.000000
10/7/2012	5:46:09 PM	H2 MFC set to  0.000000
10/7/2012	5:46:09 PM	BCl3 MFC set to  0.000000
10/7/2012	5:46:09 PM	PH3 MFC set to  0.000000
10/7/2012	5:46:09 PM	SiCl4 MFC set to  0.000000
10/7/2012	5:46:09 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	5:46:09 PM	Tube furnace set to 0
10/7/2012	5:47:09 PM	Helium valve closed
10/7/2012	5:47:09 PM	H2 valve closed
10/7/2012	5:47:09 PM	BCl3 valve closed
10/7/2012	5:47:09 PM	PH3 valve closed
10/7/2012	5:47:09 PM	SiCl4 pre valve closed
10/7/2012	5:47:09 PM	SiCl4 post valve closed
10/7/2012	5:47:09 PM	Bypass valve closed
10/7/2012	5:47:09 PM	Bubbler valve closed
10/7/2012	5:47:09 PM	Main Vac valve opened
10/7/2012	5:47:09 PM	Helium MFC set to  0.000000
10/7/2012	5:47:09 PM	H2 MFC set to  0.000000
10/7/2012	5:47:09 PM	BCl3 MFC set to  0.000000
10/7/2012	5:47:09 PM	PH3 MFC set to  0.000000
10/7/2012	5:47:09 PM	SiCl4 MFC set to  0.000000
10/7/2012	5:47:09 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	5:47:09 PM	Tube furnace set to 0
10/7/2012	5:47:10 PM	Run finished at 5:47 PM
10/7/2012	5:47:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	5:47:29 PM	Helium MFC set to  20.000000
10/7/2012	5:47:30 PM	Helium valve opened
10/7/2012	5:48:19 PM	Helium valve closed
10/7/2012	5:48:35 PM	Helium valve opened
10/7/2012	5:50:00 PM	Helium valve closed
10/7/2012	5:50:19 PM	Helium valve opened
10/7/2012	5:51:45 PM	Helium valve closed
10/7/2012	5:51:49 PM	Helium MFC set to  0.000000
10/7/2012	5:53:43 PM	Recipe started at 5:53 PM
10/7/2012	5:53:43 PM	Helium valve closed
10/7/2012	5:53:43 PM	H2 valve closed
10/7/2012	5:53:43 PM	BCl3 valve closed
10/7/2012	5:53:43 PM	PH3 valve closed
10/7/2012	5:53:43 PM	SiCl4 pre valve closed
10/7/2012	5:53:43 PM	SiCl4 post valve closed
10/7/2012	5:53:43 PM	Main Vac valve closed
10/7/2012	5:53:43 PM	Bypass valve closed
10/7/2012	5:53:43 PM	Bubbler valve closed
10/7/2012	5:53:43 PM	Helium MFC set to  0.000000
10/7/2012	5:53:43 PM	H2 MFC set to  0.000000
10/7/2012	5:53:43 PM	BCl3 MFC set to  0.000000
10/7/2012	5:53:43 PM	PH3 MFC set to  0.000000
10/7/2012	5:53:43 PM	SiCl4 MFC set to  0.000000
10/7/2012	5:53:43 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	5:53:44 PM	Tube furnace set to 0
10/7/2012	5:53:47 PM	Helium valve closed
10/7/2012	5:53:47 PM	BCl3 valve closed
10/7/2012	5:53:47 PM	PH3 valve closed
10/7/2012	5:53:47 PM	SiCl4 pre valve closed
10/7/2012	5:53:47 PM	SiCl4 post valve closed
10/7/2012	5:53:47 PM	Main Vac valve closed
10/7/2012	5:53:47 PM	Bypass valve closed
10/7/2012	5:53:47 PM	Bubbler valve closed
10/7/2012	5:53:47 PM	H2 valve opened
10/7/2012	5:53:47 PM	Helium MFC set to  0.000000
10/7/2012	5:53:47 PM	H2 MFC set to  500.000000
10/7/2012	5:53:47 PM	BCl3 MFC set to  0.000000
10/7/2012	5:53:47 PM	PH3 MFC set to  0.000000
10/7/2012	5:53:47 PM	SiCl4 MFC set to  0.000000
10/7/2012	5:53:47 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	5:53:47 PM	Tube furnace set to 0
10/7/2012	5:54:52 PM	Helium valve closed
10/7/2012	5:54:52 PM	BCl3 valve closed
10/7/2012	5:54:52 PM	PH3 valve closed
10/7/2012	5:54:52 PM	SiCl4 pre valve closed
10/7/2012	5:54:52 PM	SiCl4 post valve closed
10/7/2012	5:54:52 PM	Main Vac valve closed
10/7/2012	5:54:52 PM	Bypass valve closed
10/7/2012	5:54:52 PM	H2 valve opened
10/7/2012	5:54:52 PM	Bubbler valve opened
10/7/2012	5:54:52 PM	Helium MFC set to  0.000000
10/7/2012	5:54:52 PM	H2 MFC set to  500.000000
10/7/2012	5:54:52 PM	BCl3 MFC set to  0.000000
10/7/2012	5:54:52 PM	PH3 MFC set to  0.000000
10/7/2012	5:54:52 PM	SiCl4 MFC set to  0.000000
10/7/2012	5:54:52 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	5:54:52 PM	Tube furnace set to 0
10/7/2012	5:54:53 PM	Helium valve closed
10/7/2012	5:54:53 PM	BCl3 valve closed
10/7/2012	5:54:53 PM	PH3 valve closed
10/7/2012	5:54:53 PM	SiCl4 pre valve closed
10/7/2012	5:54:53 PM	SiCl4 post valve closed
10/7/2012	5:54:53 PM	Main Vac valve closed
10/7/2012	5:54:53 PM	Bypass valve closed
10/7/2012	5:54:53 PM	H2 valve opened
10/7/2012	5:54:53 PM	Bubbler valve opened
10/7/2012	5:54:53 PM	Helium MFC set to  0.000000
10/7/2012	5:54:53 PM	H2 MFC set to  500.000000
10/7/2012	5:54:53 PM	BCl3 MFC set to  0.000000
10/7/2012	5:54:53 PM	PH3 MFC set to  0.000000
10/7/2012	5:54:53 PM	SiCl4 MFC set to  0.000000
10/7/2012	5:54:53 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	5:54:54 PM	Tube furnace set to 950
10/7/2012	6:09:54 PM	Helium valve closed
10/7/2012	6:09:54 PM	PH3 valve closed
10/7/2012	6:09:54 PM	SiCl4 pre valve closed
10/7/2012	6:09:54 PM	SiCl4 post valve closed
10/7/2012	6:09:54 PM	Main Vac valve closed
10/7/2012	6:09:54 PM	Bypass valve closed
10/7/2012	6:09:54 PM	H2 valve opened
10/7/2012	6:09:54 PM	BCl3 valve opened
10/7/2012	6:09:54 PM	Bubbler valve opened
10/7/2012	6:09:54 PM	Helium MFC set to  0.000000
10/7/2012	6:09:54 PM	H2 MFC set to  400.000000
10/7/2012	6:09:54 PM	BCl3 MFC set to  20.000000
10/7/2012	6:09:54 PM	PH3 MFC set to  0.000000
10/7/2012	6:09:54 PM	SiCl4 MFC set to  0.000000
10/7/2012	6:09:54 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	6:09:54 PM	Tube furnace set to 950
10/7/2012	6:39:54 PM	Helium valve closed
10/7/2012	6:39:54 PM	BCl3 valve closed
10/7/2012	6:39:54 PM	PH3 valve closed
10/7/2012	6:39:54 PM	SiCl4 pre valve closed
10/7/2012	6:39:54 PM	SiCl4 post valve closed
10/7/2012	6:39:54 PM	Main Vac valve closed
10/7/2012	6:39:54 PM	Bypass valve closed
10/7/2012	6:39:54 PM	H2 valve opened
10/7/2012	6:39:54 PM	Bubbler valve opened
10/7/2012	6:39:54 PM	Helium MFC set to  0.000000
10/7/2012	6:39:54 PM	H2 MFC set to  500.000000
10/7/2012	6:39:54 PM	BCl3 MFC set to  0.000000
10/7/2012	6:39:54 PM	PH3 MFC set to  0.000000
10/7/2012	6:39:54 PM	SiCl4 MFC set to  0.000000
10/7/2012	6:39:54 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	6:39:54 PM	Tube furnace set to 750
10/7/2012	6:44:54 PM	H2 valve closed
10/7/2012	6:44:54 PM	BCl3 valve closed
10/7/2012	6:44:54 PM	PH3 valve closed
10/7/2012	6:44:54 PM	SiCl4 pre valve closed
10/7/2012	6:44:54 PM	SiCl4 post valve closed
10/7/2012	6:44:54 PM	Main Vac valve closed
10/7/2012	6:44:54 PM	Bypass valve closed
10/7/2012	6:44:54 PM	Helium valve opened
10/7/2012	6:44:54 PM	Bubbler valve opened
10/7/2012	6:44:54 PM	Helium MFC set to  500.000000
10/7/2012	6:44:54 PM	H2 MFC set to  0.000000
10/7/2012	6:44:54 PM	BCl3 MFC set to  0.000000
10/7/2012	6:44:54 PM	PH3 MFC set to  0.000000
10/7/2012	6:44:54 PM	SiCl4 MFC set to  0.000000
10/7/2012	6:44:54 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	6:44:54 PM	Tube furnace set to 0
10/7/2012	7:04:54 PM	Helium valve closed
10/7/2012	7:04:54 PM	H2 valve closed
10/7/2012	7:04:54 PM	BCl3 valve closed
10/7/2012	7:04:54 PM	PH3 valve closed
10/7/2012	7:04:54 PM	SiCl4 pre valve closed
10/7/2012	7:04:54 PM	SiCl4 post valve closed
10/7/2012	7:04:54 PM	Main Vac valve closed
10/7/2012	7:04:54 PM	Bypass valve closed
10/7/2012	7:04:54 PM	Bubbler valve closed
10/7/2012	7:04:54 PM	Helium MFC set to  0.000000
10/7/2012	7:04:54 PM	H2 MFC set to  0.000000
10/7/2012	7:04:54 PM	BCl3 MFC set to  0.000000
10/7/2012	7:04:54 PM	PH3 MFC set to  0.000000
10/7/2012	7:04:54 PM	SiCl4 MFC set to  0.000000
10/7/2012	7:04:54 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	7:04:54 PM	Tube furnace set to 0
10/7/2012	7:04:55 PM	Run finished at 7:04 PM
10/7/2012	7:36:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	7:36:49 PM	Recipe started at 7:36 PM
10/7/2012	7:36:49 PM	Helium valve closed
10/7/2012	7:36:49 PM	H2 valve closed
10/7/2012	7:36:49 PM	BCl3 valve closed
10/7/2012	7:36:49 PM	PH3 valve closed
10/7/2012	7:36:49 PM	SiCl4 pre valve closed
10/7/2012	7:36:50 PM	SiCl4 post valve closed
10/7/2012	7:36:50 PM	Main Vac valve closed
10/7/2012	7:36:50 PM	Bubbler valve closed
10/7/2012	7:36:50 PM	Bypass valve opened
10/7/2012	7:36:50 PM	Helium MFC set to  0.000000
10/7/2012	7:36:50 PM	H2 MFC set to  0.000000
10/7/2012	7:36:50 PM	BCl3 MFC set to  0.000000
10/7/2012	7:36:50 PM	PH3 MFC set to  0.000000
10/7/2012	7:36:50 PM	SiCl4 MFC set to  0.000000
10/7/2012	7:36:50 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	7:36:50 PM	Tube furnace set to 0
10/7/2012	7:37:52 PM	Helium valve closed
10/7/2012	7:37:52 PM	H2 valve closed
10/7/2012	7:37:52 PM	BCl3 valve closed
10/7/2012	7:37:52 PM	PH3 valve closed
10/7/2012	7:37:52 PM	SiCl4 pre valve closed
10/7/2012	7:37:52 PM	SiCl4 post valve closed
10/7/2012	7:37:53 PM	Main Vac valve closed
10/7/2012	7:37:53 PM	Bubbler valve closed
10/7/2012	7:37:53 PM	Bypass valve opened
10/7/2012	7:37:53 PM	Helium MFC set to  0.000000
10/7/2012	7:37:53 PM	H2 MFC set to  0.000000
10/7/2012	7:37:53 PM	BCl3 MFC set to  0.000000
10/7/2012	7:37:53 PM	PH3 MFC set to  0.000000
10/7/2012	7:37:53 PM	SiCl4 MFC set to  0.000000
10/7/2012	7:37:53 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	7:37:53 PM	Tube furnace set to 0
10/7/2012	7:38:53 PM	Helium valve closed
10/7/2012	7:38:53 PM	H2 valve closed
10/7/2012	7:38:53 PM	BCl3 valve closed
10/7/2012	7:38:53 PM	PH3 valve closed
10/7/2012	7:38:53 PM	SiCl4 pre valve closed
10/7/2012	7:38:53 PM	SiCl4 post valve closed
10/7/2012	7:38:53 PM	Bypass valve closed
10/7/2012	7:38:53 PM	Bubbler valve closed
10/7/2012	7:38:53 PM	Main Vac valve opened
10/7/2012	7:38:53 PM	Helium MFC set to  0.000000
10/7/2012	7:38:53 PM	H2 MFC set to  0.000000
10/7/2012	7:38:53 PM	BCl3 MFC set to  0.000000
10/7/2012	7:38:53 PM	PH3 MFC set to  0.000000
10/7/2012	7:38:53 PM	SiCl4 MFC set to  0.000000
10/7/2012	7:38:53 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	7:38:53 PM	Tube furnace set to 0
10/7/2012	7:38:54 PM	Run finished at 7:38 PM
10/7/2012	7:38:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	7:39:02 PM	Helium MFC set to  20.000000
10/7/2012	7:39:24 PM	Helium valve opened
10/7/2012	7:40:28 PM	Helium valve closed
10/7/2012	7:40:41 PM	Helium valve opened
10/7/2012	7:42:54 PM	Helium valve closed
10/7/2012	7:43:12 PM	Main Vac valve closed
10/7/2012	7:43:14 PM	Main Vac valve opened
10/7/2012	7:43:18 PM	Helium valve opened
10/7/2012	7:45:03 PM	Helium valve closed
10/7/2012	7:45:41 PM	Recipe started at 7:45 PM
10/7/2012	7:45:41 PM	Helium valve closed
10/7/2012	7:45:41 PM	H2 valve closed
10/7/2012	7:45:41 PM	BCl3 valve closed
10/7/2012	7:45:41 PM	PH3 valve closed
10/7/2012	7:45:41 PM	SiCl4 pre valve closed
10/7/2012	7:45:41 PM	SiCl4 post valve closed
10/7/2012	7:45:41 PM	Main Vac valve closed
10/7/2012	7:45:41 PM	Bypass valve closed
10/7/2012	7:45:41 PM	Bubbler valve closed
10/7/2012	7:45:41 PM	Helium MFC set to  0.000000
10/7/2012	7:45:41 PM	H2 MFC set to  0.000000
10/7/2012	7:45:41 PM	BCl3 MFC set to  0.000000
10/7/2012	7:45:41 PM	PH3 MFC set to  0.000000
10/7/2012	7:45:41 PM	SiCl4 MFC set to  0.000000
10/7/2012	7:45:41 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	7:45:41 PM	Tube furnace set to 0
10/7/2012	7:45:44 PM	Helium valve closed
10/7/2012	7:45:44 PM	BCl3 valve closed
10/7/2012	7:45:44 PM	PH3 valve closed
10/7/2012	7:45:44 PM	SiCl4 pre valve closed
10/7/2012	7:45:44 PM	SiCl4 post valve closed
10/7/2012	7:45:44 PM	Main Vac valve closed
10/7/2012	7:45:44 PM	Bypass valve closed
10/7/2012	7:45:44 PM	Bubbler valve closed
10/7/2012	7:45:44 PM	H2 valve opened
10/7/2012	7:45:44 PM	Helium MFC set to  0.000000
10/7/2012	7:45:44 PM	H2 MFC set to  500.000000
10/7/2012	7:45:44 PM	BCl3 MFC set to  0.000000
10/7/2012	7:45:44 PM	PH3 MFC set to  0.000000
10/7/2012	7:45:44 PM	SiCl4 MFC set to  0.000000
10/7/2012	7:45:44 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	7:45:44 PM	Tube furnace set to 0
10/7/2012	7:46:51 PM	Helium valve closed
10/7/2012	7:46:51 PM	BCl3 valve closed
10/7/2012	7:46:51 PM	PH3 valve closed
10/7/2012	7:46:51 PM	SiCl4 pre valve closed
10/7/2012	7:46:51 PM	SiCl4 post valve closed
10/7/2012	7:46:51 PM	Main Vac valve closed
10/7/2012	7:46:51 PM	Bypass valve closed
10/7/2012	7:46:51 PM	H2 valve opened
10/7/2012	7:46:52 PM	Bubbler valve opened
10/7/2012	7:46:52 PM	Helium MFC set to  0.000000
10/7/2012	7:46:52 PM	H2 MFC set to  500.000000
10/7/2012	7:46:52 PM	BCl3 MFC set to  0.000000
10/7/2012	7:46:52 PM	PH3 MFC set to  0.000000
10/7/2012	7:46:52 PM	SiCl4 MFC set to  0.000000
10/7/2012	7:46:52 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	7:46:52 PM	Tube furnace set to 0
10/7/2012	7:46:53 PM	Helium valve closed
10/7/2012	7:46:53 PM	BCl3 valve closed
10/7/2012	7:46:53 PM	PH3 valve closed
10/7/2012	7:46:53 PM	SiCl4 pre valve closed
10/7/2012	7:46:53 PM	SiCl4 post valve closed
10/7/2012	7:46:53 PM	Main Vac valve closed
10/7/2012	7:46:53 PM	Bypass valve closed
10/7/2012	7:46:53 PM	H2 valve opened
10/7/2012	7:46:53 PM	Bubbler valve opened
10/7/2012	7:46:53 PM	Helium MFC set to  0.000000
10/7/2012	7:46:53 PM	H2 MFC set to  500.000000
10/7/2012	7:46:53 PM	BCl3 MFC set to  0.000000
10/7/2012	7:46:53 PM	PH3 MFC set to  0.000000
10/7/2012	7:46:53 PM	SiCl4 MFC set to  0.000000
10/7/2012	7:46:53 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	7:46:53 PM	Tube furnace set to 950
10/7/2012	8:01:53 PM	Helium valve closed
10/7/2012	8:01:53 PM	PH3 valve closed
10/7/2012	8:01:53 PM	SiCl4 pre valve closed
10/7/2012	8:01:53 PM	SiCl4 post valve closed
10/7/2012	8:01:53 PM	Main Vac valve closed
10/7/2012	8:01:53 PM	Bypass valve closed
10/7/2012	8:01:53 PM	H2 valve opened
10/7/2012	8:01:53 PM	BCl3 valve opened
10/7/2012	8:01:53 PM	Bubbler valve opened
10/7/2012	8:01:53 PM	Helium MFC set to  0.000000
10/7/2012	8:01:53 PM	H2 MFC set to  400.000000
10/7/2012	8:01:53 PM	BCl3 MFC set to  20.000000
10/7/2012	8:01:53 PM	PH3 MFC set to  0.000000
10/7/2012	8:01:53 PM	SiCl4 MFC set to  0.000000
10/7/2012	8:01:53 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	8:01:53 PM	Tube furnace set to 950
10/7/2012	8:31:53 PM	Helium valve closed
10/7/2012	8:31:53 PM	BCl3 valve closed
10/7/2012	8:31:53 PM	PH3 valve closed
10/7/2012	8:31:53 PM	SiCl4 pre valve closed
10/7/2012	8:31:53 PM	SiCl4 post valve closed
10/7/2012	8:31:53 PM	Main Vac valve closed
10/7/2012	8:31:53 PM	Bypass valve closed
10/7/2012	8:31:53 PM	H2 valve opened
10/7/2012	8:31:53 PM	Bubbler valve opened
10/7/2012	8:31:53 PM	Helium MFC set to  0.000000
10/7/2012	8:31:53 PM	H2 MFC set to  500.000000
10/7/2012	8:31:53 PM	BCl3 MFC set to  0.000000
10/7/2012	8:31:53 PM	PH3 MFC set to  0.000000
10/7/2012	8:31:53 PM	SiCl4 MFC set to  0.000000
10/7/2012	8:31:53 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	8:31:53 PM	Tube furnace set to 750
10/7/2012	8:32:45 PM	H2 valve closed
10/7/2012	8:32:45 PM	BCl3 valve closed
10/7/2012	8:32:45 PM	PH3 valve closed
10/7/2012	8:32:45 PM	SiCl4 pre valve closed
10/7/2012	8:32:45 PM	SiCl4 post valve closed
10/7/2012	8:32:45 PM	Main Vac valve closed
10/7/2012	8:32:45 PM	Bypass valve closed
10/7/2012	8:32:45 PM	Helium valve opened
10/7/2012	8:32:45 PM	Bubbler valve opened
10/7/2012	8:32:45 PM	Helium MFC set to  500.000000
10/7/2012	8:32:45 PM	H2 MFC set to  0.000000
10/7/2012	8:32:45 PM	BCl3 MFC set to  0.000000
10/7/2012	8:32:45 PM	PH3 MFC set to  0.000000
10/7/2012	8:32:45 PM	SiCl4 MFC set to  0.000000
10/7/2012	8:32:45 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	8:32:45 PM	Tube furnace set to 0
10/7/2012	8:35:04 PM	Helium valve closed
10/7/2012	8:35:04 PM	H2 valve closed
10/7/2012	8:35:04 PM	BCl3 valve closed
10/7/2012	8:35:04 PM	PH3 valve closed
10/7/2012	8:35:04 PM	SiCl4 pre valve closed
10/7/2012	8:35:04 PM	SiCl4 post valve closed
10/7/2012	8:35:04 PM	Main Vac valve closed
10/7/2012	8:35:04 PM	Bypass valve closed
10/7/2012	8:35:04 PM	Bubbler valve closed
10/7/2012	8:35:04 PM	Helium MFC set to  0.000000
10/7/2012	8:35:04 PM	H2 MFC set to  0.000000
10/7/2012	8:35:04 PM	BCl3 MFC set to  0.000000
10/7/2012	8:35:04 PM	PH3 MFC set to  0.000000
10/7/2012	8:35:04 PM	SiCl4 MFC set to  0.000000
10/7/2012	8:35:04 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	8:35:05 PM	Tube furnace set to 0
10/7/2012	8:35:06 PM	Run finished at 8:35 PM
10/7/2012	8:35:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2012	8:35:10 PM	Recipe started at 8:35 PM
10/7/2012	8:35:10 PM	Helium valve closed
10/7/2012	8:35:10 PM	H2 valve closed
10/7/2012	8:35:10 PM	BCl3 valve closed
10/7/2012	8:35:10 PM	PH3 valve closed
10/7/2012	8:35:10 PM	SiCl4 pre valve closed
10/7/2012	8:35:10 PM	SiCl4 post valve closed
10/7/2012	8:35:10 PM	Main Vac valve closed
10/7/2012	8:35:10 PM	Bypass valve closed
10/7/2012	8:35:10 PM	Bubbler valve closed
10/7/2012	8:35:10 PM	Helium MFC set to  0.000000
10/7/2012	8:35:10 PM	H2 MFC set to  0.000000
10/7/2012	8:35:10 PM	BCl3 MFC set to  0.000000
10/7/2012	8:35:10 PM	PH3 MFC set to  0.000000
10/7/2012	8:35:10 PM	SiCl4 MFC set to  0.000000
10/7/2012	8:35:10 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	8:35:10 PM	Tube furnace set to 0
10/7/2012	8:35:13 PM	H2 valve closed
10/7/2012	8:35:13 PM	BCl3 valve closed
10/7/2012	8:35:13 PM	PH3 valve closed
10/7/2012	8:35:13 PM	SiCl4 pre valve closed
10/7/2012	8:35:13 PM	SiCl4 post valve closed
10/7/2012	8:35:13 PM	Main Vac valve closed
10/7/2012	8:35:13 PM	Bypass valve closed
10/7/2012	8:35:13 PM	Bubbler valve closed
10/7/2012	8:35:13 PM	Helium valve opened
10/7/2012	8:35:13 PM	Helium MFC set to  500.000000
10/7/2012	8:35:13 PM	H2 MFC set to  0.000000
10/7/2012	8:35:13 PM	BCl3 MFC set to  0.000000
10/7/2012	8:35:13 PM	PH3 MFC set to  0.000000
10/7/2012	8:35:13 PM	SiCl4 MFC set to  0.000000
10/7/2012	8:35:13 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	8:35:13 PM	Tube furnace set to 0
10/7/2012	8:35:14 PM	Helium valve closed
10/7/2012	8:35:14 PM	H2 valve closed
10/7/2012	8:35:14 PM	BCl3 valve closed
10/7/2012	8:35:14 PM	PH3 valve closed
10/7/2012	8:35:14 PM	SiCl4 pre valve closed
10/7/2012	8:35:14 PM	SiCl4 post valve closed
10/7/2012	8:35:14 PM	Main Vac valve closed
10/7/2012	8:35:14 PM	Bypass valve closed
10/7/2012	8:35:14 PM	Bubbler valve closed
10/7/2012	8:35:14 PM	Helium MFC set to  0.000000
10/7/2012	8:35:14 PM	H2 MFC set to  0.000000
10/7/2012	8:35:14 PM	BCl3 MFC set to  0.000000
10/7/2012	8:35:14 PM	PH3 MFC set to  0.000000
10/7/2012	8:35:14 PM	SiCl4 MFC set to  0.000000
10/7/2012	8:35:14 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	8:35:14 PM	Tube furnace set to 0
10/7/2012	8:35:15 PM	Run finished at 8:35 PM
10/7/2012	8:35:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2012	8:37:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	8:37:59 PM	Recipe started at 8:37 PM
10/7/2012	8:38:00 PM	Helium valve closed
10/7/2012	8:38:00 PM	H2 valve closed
10/7/2012	8:38:00 PM	BCl3 valve closed
10/7/2012	8:38:00 PM	PH3 valve closed
10/7/2012	8:38:00 PM	SiCl4 pre valve closed
10/7/2012	8:38:00 PM	SiCl4 post valve closed
10/7/2012	8:38:00 PM	Main Vac valve closed
10/7/2012	8:38:00 PM	Bubbler valve closed
10/7/2012	8:38:00 PM	Bypass valve opened
10/7/2012	8:38:00 PM	Helium MFC set to  0.000000
10/7/2012	8:38:00 PM	H2 MFC set to  0.000000
10/7/2012	8:38:00 PM	BCl3 MFC set to  0.000000
10/7/2012	8:38:00 PM	PH3 MFC set to  0.000000
10/7/2012	8:38:00 PM	SiCl4 MFC set to  0.000000
10/7/2012	8:38:00 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	8:38:00 PM	Tube furnace set to 0
10/7/2012	8:39:00 PM	Helium valve closed
10/7/2012	8:39:00 PM	H2 valve closed
10/7/2012	8:39:00 PM	BCl3 valve closed
10/7/2012	8:39:00 PM	PH3 valve closed
10/7/2012	8:39:00 PM	SiCl4 pre valve closed
10/7/2012	8:39:00 PM	SiCl4 post valve closed
10/7/2012	8:39:00 PM	Main Vac valve closed
10/7/2012	8:39:00 PM	Bubbler valve closed
10/7/2012	8:39:00 PM	Bypass valve opened
10/7/2012	8:39:00 PM	Helium MFC set to  0.000000
10/7/2012	8:39:00 PM	H2 MFC set to  0.000000
10/7/2012	8:39:00 PM	BCl3 MFC set to  0.000000
10/7/2012	8:39:00 PM	PH3 MFC set to  0.000000
10/7/2012	8:39:00 PM	SiCl4 MFC set to  0.000000
10/7/2012	8:39:00 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	8:39:00 PM	Tube furnace set to 0
10/7/2012	8:40:00 PM	Helium valve closed
10/7/2012	8:40:00 PM	H2 valve closed
10/7/2012	8:40:00 PM	BCl3 valve closed
10/7/2012	8:40:00 PM	PH3 valve closed
10/7/2012	8:40:00 PM	SiCl4 pre valve closed
10/7/2012	8:40:00 PM	SiCl4 post valve closed
10/7/2012	8:40:00 PM	Bypass valve closed
10/7/2012	8:40:00 PM	Bubbler valve closed
10/7/2012	8:40:00 PM	Main Vac valve opened
10/7/2012	8:40:00 PM	Helium MFC set to  0.000000
10/7/2012	8:40:00 PM	H2 MFC set to  0.000000
10/7/2012	8:40:00 PM	BCl3 MFC set to  0.000000
10/7/2012	8:40:00 PM	PH3 MFC set to  0.000000
10/7/2012	8:40:00 PM	SiCl4 MFC set to  0.000000
10/7/2012	8:40:00 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	8:40:00 PM	Tube furnace set to 0
10/7/2012	8:40:01 PM	Run finished at 8:40 PM
10/7/2012	8:40:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	8:40:08 PM	Helium MFC set to  20.000000
10/7/2012	8:40:37 PM	Helium valve opened
10/7/2012	8:43:06 PM	Helium valve closed
10/7/2012	8:43:24 PM	Helium valve opened
10/7/2012	8:44:15 PM	Helium valve closed
10/7/2012	8:44:43 PM	Recipe started at 8:44 PM
10/7/2012	8:44:43 PM	Helium valve closed
10/7/2012	8:44:43 PM	H2 valve closed
10/7/2012	8:44:43 PM	BCl3 valve closed
10/7/2012	8:44:43 PM	PH3 valve closed
10/7/2012	8:44:43 PM	SiCl4 pre valve closed
10/7/2012	8:44:43 PM	SiCl4 post valve closed
10/7/2012	8:44:43 PM	Main Vac valve closed
10/7/2012	8:44:43 PM	Bypass valve closed
10/7/2012	8:44:43 PM	Bubbler valve closed
10/7/2012	8:44:43 PM	Helium MFC set to  0.000000
10/7/2012	8:44:43 PM	H2 MFC set to  0.000000
10/7/2012	8:44:43 PM	BCl3 MFC set to  0.000000
10/7/2012	8:44:43 PM	PH3 MFC set to  0.000000
10/7/2012	8:44:43 PM	SiCl4 MFC set to  0.000000
10/7/2012	8:44:43 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	8:44:43 PM	Tube furnace set to 0
10/7/2012	8:44:46 PM	Helium valve closed
10/7/2012	8:44:46 PM	BCl3 valve closed
10/7/2012	8:44:46 PM	PH3 valve closed
10/7/2012	8:44:46 PM	SiCl4 pre valve closed
10/7/2012	8:44:46 PM	SiCl4 post valve closed
10/7/2012	8:44:46 PM	Main Vac valve closed
10/7/2012	8:44:46 PM	Bypass valve closed
10/7/2012	8:44:46 PM	Bubbler valve closed
10/7/2012	8:44:46 PM	H2 valve opened
10/7/2012	8:44:46 PM	Helium MFC set to  0.000000
10/7/2012	8:44:46 PM	H2 MFC set to  500.000000
10/7/2012	8:44:46 PM	BCl3 MFC set to  0.000000
10/7/2012	8:44:46 PM	PH3 MFC set to  0.000000
10/7/2012	8:44:46 PM	SiCl4 MFC set to  0.000000
10/7/2012	8:44:46 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	8:44:47 PM	Tube furnace set to 0
10/7/2012	8:45:52 PM	Helium valve closed
10/7/2012	8:45:52 PM	BCl3 valve closed
10/7/2012	8:45:52 PM	PH3 valve closed
10/7/2012	8:45:52 PM	SiCl4 pre valve closed
10/7/2012	8:45:52 PM	SiCl4 post valve closed
10/7/2012	8:45:52 PM	Main Vac valve closed
10/7/2012	8:45:52 PM	Bypass valve closed
10/7/2012	8:45:52 PM	H2 valve opened
10/7/2012	8:45:52 PM	Bubbler valve opened
10/7/2012	8:45:52 PM	Helium MFC set to  0.000000
10/7/2012	8:45:52 PM	H2 MFC set to  500.000000
10/7/2012	8:45:52 PM	BCl3 MFC set to  0.000000
10/7/2012	8:45:52 PM	PH3 MFC set to  0.000000
10/7/2012	8:45:52 PM	SiCl4 MFC set to  0.000000
10/7/2012	8:45:52 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	8:45:52 PM	Tube furnace set to 0
10/7/2012	8:45:53 PM	Helium valve closed
10/7/2012	8:45:53 PM	BCl3 valve closed
10/7/2012	8:45:53 PM	PH3 valve closed
10/7/2012	8:45:53 PM	SiCl4 pre valve closed
10/7/2012	8:45:53 PM	SiCl4 post valve closed
10/7/2012	8:45:53 PM	Main Vac valve closed
10/7/2012	8:45:53 PM	Bypass valve closed
10/7/2012	8:45:53 PM	H2 valve opened
10/7/2012	8:45:53 PM	Bubbler valve opened
10/7/2012	8:45:53 PM	Helium MFC set to  0.000000
10/7/2012	8:45:53 PM	H2 MFC set to  500.000000
10/7/2012	8:45:53 PM	BCl3 MFC set to  0.000000
10/7/2012	8:45:53 PM	PH3 MFC set to  0.000000
10/7/2012	8:45:53 PM	SiCl4 MFC set to  0.000000
10/7/2012	8:45:53 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	8:45:53 PM	Tube furnace set to 950
10/7/2012	9:00:53 PM	Helium valve closed
10/7/2012	9:00:53 PM	PH3 valve closed
10/7/2012	9:00:53 PM	SiCl4 pre valve closed
10/7/2012	9:00:53 PM	SiCl4 post valve closed
10/7/2012	9:00:53 PM	Main Vac valve closed
10/7/2012	9:00:53 PM	Bypass valve closed
10/7/2012	9:00:53 PM	H2 valve opened
10/7/2012	9:00:53 PM	BCl3 valve opened
10/7/2012	9:00:53 PM	Bubbler valve opened
10/7/2012	9:00:53 PM	Helium MFC set to  0.000000
10/7/2012	9:00:53 PM	H2 MFC set to  400.000000
10/7/2012	9:00:53 PM	BCl3 MFC set to  20.000000
10/7/2012	9:00:53 PM	PH3 MFC set to  0.000000
10/7/2012	9:00:53 PM	SiCl4 MFC set to  0.000000
10/7/2012	9:00:53 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	9:00:54 PM	Tube furnace set to 950
10/7/2012	9:30:54 PM	Helium valve closed
10/7/2012	9:30:54 PM	BCl3 valve closed
10/7/2012	9:30:54 PM	PH3 valve closed
10/7/2012	9:30:54 PM	SiCl4 pre valve closed
10/7/2012	9:30:54 PM	SiCl4 post valve closed
10/7/2012	9:30:54 PM	Main Vac valve closed
10/7/2012	9:30:54 PM	Bypass valve closed
10/7/2012	9:30:54 PM	H2 valve opened
10/7/2012	9:30:54 PM	Bubbler valve opened
10/7/2012	9:30:54 PM	Helium MFC set to  0.000000
10/7/2012	9:30:54 PM	H2 MFC set to  500.000000
10/7/2012	9:30:54 PM	BCl3 MFC set to  0.000000
10/7/2012	9:30:54 PM	PH3 MFC set to  0.000000
10/7/2012	9:30:54 PM	SiCl4 MFC set to  0.000000
10/7/2012	9:30:54 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	9:30:54 PM	Tube furnace set to 750
10/7/2012	9:35:54 PM	H2 valve closed
10/7/2012	9:35:54 PM	BCl3 valve closed
10/7/2012	9:35:54 PM	PH3 valve closed
10/7/2012	9:35:54 PM	SiCl4 pre valve closed
10/7/2012	9:35:54 PM	SiCl4 post valve closed
10/7/2012	9:35:54 PM	Main Vac valve closed
10/7/2012	9:35:54 PM	Bypass valve closed
10/7/2012	9:35:54 PM	Helium valve opened
10/7/2012	9:35:54 PM	Bubbler valve opened
10/7/2012	9:35:54 PM	Helium MFC set to  500.000000
10/7/2012	9:35:54 PM	H2 MFC set to  0.000000
10/7/2012	9:35:54 PM	BCl3 MFC set to  0.000000
10/7/2012	9:35:54 PM	PH3 MFC set to  0.000000
10/7/2012	9:35:54 PM	SiCl4 MFC set to  0.000000
10/7/2012	9:35:54 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	9:35:54 PM	Tube furnace set to 0
10/7/2012	9:55:54 PM	Helium valve closed
10/7/2012	9:55:54 PM	H2 valve closed
10/7/2012	9:55:54 PM	BCl3 valve closed
10/7/2012	9:55:54 PM	PH3 valve closed
10/7/2012	9:55:54 PM	SiCl4 pre valve closed
10/7/2012	9:55:54 PM	SiCl4 post valve closed
10/7/2012	9:55:54 PM	Main Vac valve closed
10/7/2012	9:55:54 PM	Bypass valve closed
10/7/2012	9:55:54 PM	Bubbler valve closed
10/7/2012	9:55:54 PM	Helium MFC set to  0.000000
10/7/2012	9:55:54 PM	H2 MFC set to  0.000000
10/7/2012	9:55:54 PM	BCl3 MFC set to  0.000000
10/7/2012	9:55:54 PM	PH3 MFC set to  0.000000
10/7/2012	9:55:54 PM	SiCl4 MFC set to  0.000000
10/7/2012	9:55:54 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	9:55:54 PM	Tube furnace set to 0
10/7/2012	9:55:55 PM	Run finished at 9:55 PM
10/7/2012	11:44:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	11:44:15 PM	Recipe started at 11:44 PM
10/7/2012	11:44:15 PM	Helium valve closed
10/7/2012	11:44:15 PM	H2 valve closed
10/7/2012	11:44:15 PM	BCl3 valve closed
10/7/2012	11:44:15 PM	PH3 valve closed
10/7/2012	11:44:15 PM	SiCl4 pre valve closed
10/7/2012	11:44:15 PM	SiCl4 post valve closed
10/7/2012	11:44:15 PM	Main Vac valve closed
10/7/2012	11:44:15 PM	Bubbler valve closed
10/7/2012	11:44:15 PM	Bypass valve opened
10/7/2012	11:44:15 PM	Helium MFC set to  0.000000
10/7/2012	11:44:15 PM	H2 MFC set to  0.000000
10/7/2012	11:44:15 PM	BCl3 MFC set to  0.000000
10/7/2012	11:44:15 PM	PH3 MFC set to  0.000000
10/7/2012	11:44:15 PM	SiCl4 MFC set to  0.000000
10/7/2012	11:44:15 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	11:44:15 PM	Tube furnace set to 0
10/7/2012	11:45:20 PM	Helium valve closed
10/7/2012	11:45:20 PM	H2 valve closed
10/7/2012	11:45:20 PM	BCl3 valve closed
10/7/2012	11:45:20 PM	PH3 valve closed
10/7/2012	11:45:20 PM	SiCl4 pre valve closed
10/7/2012	11:45:20 PM	SiCl4 post valve closed
10/7/2012	11:45:20 PM	Main Vac valve closed
10/7/2012	11:45:20 PM	Bubbler valve closed
10/7/2012	11:45:20 PM	Bypass valve opened
10/7/2012	11:45:20 PM	Helium MFC set to  0.000000
10/7/2012	11:45:20 PM	H2 MFC set to  0.000000
10/7/2012	11:45:20 PM	BCl3 MFC set to  0.000000
10/7/2012	11:45:20 PM	PH3 MFC set to  0.000000
10/7/2012	11:45:20 PM	SiCl4 MFC set to  0.000000
10/7/2012	11:45:20 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	11:45:20 PM	Tube furnace set to 0
10/7/2012	11:45:28 PM	Helium valve closed
10/7/2012	11:45:28 PM	H2 valve closed
10/7/2012	11:45:28 PM	BCl3 valve closed
10/7/2012	11:45:28 PM	PH3 valve closed
10/7/2012	11:45:29 PM	SiCl4 pre valve closed
10/7/2012	11:45:29 PM	SiCl4 post valve closed
10/7/2012	11:45:29 PM	Bypass valve closed
10/7/2012	11:45:29 PM	Bubbler valve closed
10/7/2012	11:45:29 PM	Main Vac valve opened
10/7/2012	11:45:29 PM	Helium MFC set to  0.000000
10/7/2012	11:45:29 PM	H2 MFC set to  0.000000
10/7/2012	11:45:29 PM	BCl3 MFC set to  0.000000
10/7/2012	11:45:29 PM	PH3 MFC set to  0.000000
10/7/2012	11:45:29 PM	SiCl4 MFC set to  0.000000
10/7/2012	11:45:29 PM	Bypass solenoid MFC set to  0.000000
10/7/2012	11:45:29 PM	Tube furnace set to 0
10/7/2012	11:45:30 PM	Run finished at 11:45 PM
10/7/2012	11:45:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2012	11:45:40 PM	Helium MFC set to  20.000000
10/7/2012	11:45:48 PM	Helium valve opened
10/7/2012	11:47:00 PM	Helium valve closed
10/7/2012	11:47:15 PM	Helium valve opened
